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Volumn 48, Issue 6 PART 2, 2009, Pages
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Enhanced sensitivity of novel surface acoustic wave microelectromechanical system-interdigital transducer gyroscope
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Author keywords
[No Author keywords available]
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Indexed keywords
ANGULAR RATE;
CENTRAL FREQUENCY;
COUPLING OF MODES;
DELAY LINE;
DIRECTIVITY;
DUAL DELAY LINE;
ELECTRICAL TESTING;
ENHANCED SENSITIVITY;
INTERDIGITAL TRANSDUCER;
INTERFERENCE EFFECTS;
LOW INSERTION LOSS;
MICRO ELECTRO MECHANICAL SYSTEM;
NETWORK ANALYZER;
NORMAL DIRECTION;
NOVEL SURFACES;
OPERATION FREQUENCY;
OPTIMAL DESIGN PARAMETERS;
RESONANT FREQUENCIES;
SAW RESONATORS;
STANDING WAVE;
SURFACE ACOUSTIC WAVES;
TWO OSCILLATORS;
ACOUSTIC WAVES;
ACOUSTICS;
ACOUSTOELECTRIC EFFECTS;
COMPOSITE MICROMECHANICS;
CORIOLIS FORCE;
ELECTRIC DELAY LINES;
ELECTRIC NETWORK ANALYSIS;
GYROSCOPES;
MECHATRONICS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
NATURAL FREQUENCIES;
OSCILLATORS (ELECTRONIC);
PIEZOELECTRIC TRANSDUCERS;
RESONATORS;
STANDING WAVE METERS;
ULTRASONIC TRANSDUCERS;
WAVES;
ACOUSTIC SURFACE WAVE DEVICES;
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EID: 70249087696
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.48.06FK09 Document Type: Article |
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Times cited : (36)
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References (12)
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