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Volumn 42, Issue 18, 2009, Pages
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Improved V-shaped microcantilever width profile for sensing applications
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVE AREA;
DEFLECTION MODELS;
LINEAR PROFILES;
MICRO-CANTILEVERS;
NONLINEAR PROFILES;
RAYLEIGH-RITZ METHODS;
RESONANT FREQUENCIES;
SENSING APPLICATIONS;
SPRING CONSTANTS;
COMPOSITE MICROMECHANICS;
NANOCANTILEVERS;
NATURAL FREQUENCIES;
SUGAR (SUCROSE);
SUGARS;
ATOMIC FORCE MICROSCOPY;
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EID: 70149099934
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/42/18/185501 Document Type: Article |
Times cited : (14)
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References (9)
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