메뉴 건너뛰기




Volumn 42, Issue 18, 2009, Pages

Improved V-shaped microcantilever width profile for sensing applications

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE AREA; DEFLECTION MODELS; LINEAR PROFILES; MICRO-CANTILEVERS; NONLINEAR PROFILES; RAYLEIGH-RITZ METHODS; RESONANT FREQUENCIES; SENSING APPLICATIONS; SPRING CONSTANTS;

EID: 70149099934     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/18/185501     Document Type: Article
Times cited : (14)

References (9)
  • 1
    • 4344705534 scopus 로고    scopus 로고
    • Signal-to-noise Ratio of Resonant Microcantilever Type Chemical Sensors as a Function of Resonant Frequency and Quality Factor
    • Fadel L, Dufour I, Lochon F and Francais O 2004 Signal-to-noise ratio of resonant microcantilever type chemical sensors as a function of resonant frequency and quality factor Sensors Actuators B 102 73-7
    • (2004) Sensors Actuators B , vol.102 , pp. 73-77
    • Fadel, L.1    Dufour, I.2    Lochon, F.3    Francais, O.4
  • 2
    • 3042684304 scopus 로고    scopus 로고
    • Influence of the surface stress on the frequency of microcantilever-based biosensors
    • Ren Q and Zhao Y 2004 Influence of the surface stress on the frequency of microcantilever-based biosensors Microsyst. Technol. 10 307-14
    • (2004) Microsyst. Technol. , vol.10 , pp. 307-314
    • Ren, Q.1    Zhao, Y.2
  • 3
    • 3843119792 scopus 로고    scopus 로고
    • Cantilever transducers as a platform for chemical and biological sensors
    • Lavnik N V, Sepaniak M J and Datskos P G 2004 Cantilever transducers as a platform for chemical and biological sensors Rev. Sci. Instrum. 75 2229-53
    • (2004) Rev. Sci. Instrum. , vol.75 , pp. 2229-2253
    • Lavnik, N.V.1    Sepaniak, M.J.2    Datskos, P.G.3
  • 4
    • 14044277480 scopus 로고    scopus 로고
    • Calibration of silicon atomic force microscope cantilevers
    • Gibson C, Smith D and Roberts C 2005 Calibration of silicon atomic force microscope cantilevers Nanotechnol. 16 234-8
    • (2005) Nanotechol. , vol.16 , pp. 234-238
    • Gibson, C.1    Smith, D.2    Roberts, C.3
  • 5
    • 36449002856 scopus 로고
    • Method for the calibration of atomic force microscope cantilevers
    • Sader J, Larson I, Mulvaney P and White L 1995 Method for the calibration of atomic force microscope cantilevers Rev. Sci. Instrum. 66 3789-98
    • (1995) Rev. Sci. Instrum. , vol.66 , pp. 3789-3798
    • Sader, J.1    Larson, I.2    Mulvaney, P.3    White, L.4
  • 8
    • 40549142764 scopus 로고    scopus 로고
    • Theoretical analysis of surface stress for a microcantilever with varying width
    • Li X F and Peng X L 2008 Theoretical analysis of surface stress for a microcantilever with varying width J. Phys. D: Appl. Phys. 41 065301
    • (2008) J. Phys. D: Appl. Phys. , vol.41 , pp. 065301
    • Li, X.F.1    Peng, X.L.2
  • 9
    • 35648961433 scopus 로고    scopus 로고
    • Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants
    • Pal P, Sato K, Gonsalves M and Shikida M 2007 Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants J. Micromech. Microeng. 17 2299-307
    • (2007) J. Micromech. Microeng. , vol.17 , pp. 2299-2307
    • Pal, P.1    Sato, K.2    Gonsalves, M.3    Shikida, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.