Status of P-on-N HgCdTe technologies at DEFIR

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7298, Issue , 2009, Pages

  Baier, N ^a   Mollard, L ^a   Rothman, J ^a   Destefanis, G ^a   Ballet, P ^a   Bourgeois, G ^a   Zanatta, J P ^a   Tchagaspanian, M ^a   Courtas, S ^b   Fougeres P ^b   Pautet, C ^b   Pidancier, P ^b   Rubaldo, L ^b  

^a CEA GRENOBLE   (France)

^b SOFRADIR   (France)

Author keywords

Arsenic implantation; Arsenic in situ; HgCdTe; IR sensors; P on n photodiodes; R0A figure of merit

Indexed keywords

ARSENIC IMPLANTATION; HGCDTE; IR SENSORS; P-ON-N PHOTODIODES; R0A FIGURE OF MERIT;

ARSENIC; CADMIUM COMPOUNDS; CHARACTERIZATION; CRYSTAL GROWTH; FOCAL PLANE ARRAYS; INFRARED DETECTORS; INFRARED RADIATION; MERCURY (METAL); MERCURY COMPOUNDS; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; OPTOELECTRONIC DEVICES; PHOTODIODES; SENSORS; TECHNOLOGY;

HETEROJUNCTION BIPOLAR TRANSISTORS;

EID: 69949158572     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.820343     Document Type: Conference Paper

References (9)

1. Destefanis, G.L., "Electrical doping of HgCdTe by ion implantation and heat treatment", Journal of Crystal Growth Vol. 86, 700-722 (1988)
2. Tribolet, P., "Third generation and multicolor IRFPA developments: a unique approach based on DEFIR", Proc. of SPIE Vol. 5783, 350-364 (2005)
3. Mollard, L., " HgCdTe FPAs made by arsenic-ion implantation", Proc. of SPIE Vol. 6940, 69400F (2008)
4. Gravrand, O., "HgCdTe P on N focal plane array fabrication using arsenic incorporation during MBE growth", Journal of Electronic Materials, to be Published
5. xTe", Journal of Applied Physics Vol. 53(10), 7099-7101 (1982)
6. Rothman, J., Meilhan, J., Perrais, G., Belle, J.-P. and Gravrand, O., "Maximum entropy mobility spectrum analysis of HgCdTe heterostructures", Journal of Electronic Materials, Vol 35, N°6, 1174-1184 (2006)
7. Willardson, R.K. and Beer, A.C. , Semiconductors and Semimetals, Academic Press, Vol.18 (1981)
8. Chuh, T.Y., "Recent developments in infrared and visible imaging for astronomy, defense, and homeland security", Proc. of SPIE Vol. 5563, 19-34 (2004)
9. Kinch, M.A., "Fundamentals of Infrared Detector Materials", SPIE tutorial text Vol. TT76 (2007)