Fabrication of nanoporous gold thin films on silicon substrate by multilayer deposition of Au and Ag

Journal of Alloys and Compounds

Volumn 484, Issue 1-2, 2009, Pages 28-32

  Kim, Minho ^a   Ha, Woo Jin ^a   Anh, Jin Woo ^a   Kim, Hye Sung ^a   Park, Sang Whan ^b   Lee, Dongyun ^a  

^a Pusan National University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Electrolytic dealloying; Heat treatment; Nanoporous gold; Physical vapor deposition; Thin films

Indexed keywords

AG FILMS; AG-ALLOY; CHEMICAL COMPOSITIONS; DEALLOYING; DISSOLUTION RATES; ELEVATED TEMPERATURE; MULTILAYER DEPOSITIONS; NANOPOROUS GOLD; SI SUBSTRATES; SILICON SUBSTRATES;

DEPOSITION; DISSOLUTION; FABRICATION; FILM PREPARATION; GOLD COATINGS; GOLD DEPOSITS; METALLIC FILMS; MULTILAYER FILMS; MULTILAYERS; PHYSICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILICON ALLOYS; SILVER; SILVER ALLOYS; SUBSTRATES;

GOLD;

EID: 69949085784     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2009.05.067     Document Type: Letter

References (18)

1. Ding Y., and Erlebacher J. J. Am. Chem. Soc. 125 (2003) 7772-7773
2. Kramer D., Viswanath R.N., and Weissmuller J. Nano Lett. 4 (2004) 793-796
3. Lavrik N.V., Tipple C.A., Sepaniak M.J., and Datskos P.G. Biomed. Microdevices 3 (2001) 35-44
4. Steele B.C.H., and Heinzel A. Nature 414 (2001) 345-352
5. Chun K.Y., and Stroeve P. Langmuir 17 (2001) 5271-5275
6. Erlebacher J., Aziz M.J., Karma A., Dimitrov N., and Sieradzki K. Nature 410 (2001) 450-453
7. Lee D., Wei X.D., Zhao M.H., Chen X., Jun S.C., Hone J., and Kysar J.W. Model. Simul. Mater. Sci. Eng. 15 (2007) S181-S192
8. Wirtz M., and Martin C.R. Adv. Mater. 15 (2003) 455-458
9. Liu Z., and Searson P.C. J. Phys. Chem. B 110 (2006) 4318-4322
10. Parida S., Kramer D., Volkert C.A., Roesner H., Erlebacher J., and Weissmuller J. Phys. Rev. Lett. 97 (2006) 035504
11. Sun Y., Kucera K.P., Burger S.A., and Balk T.J. Scripta Mater. 58 (2008) 1018-1021
12. Brandes E., and Brook G. Smithells Metals Reference Book. 7th ed. (1992)
13. Senior N.A., and Newman R.C. Nanotechnology 17 (2006) 2311-2316
14. Schumacher S., Birringer R., Strauss R., and Gleiter H. Acta Metall. 37 (1989) 2485-2488
15. Ohring M. Materials Science of Thin Films-Deposition and Structure. 2nd ed. (2002), Academic Press
16. Meinel K., Klaua M., and Bethge H. Phys. Status Solidi A 106 (1988) 133-144
17. Lu X., Balk T.J., Spolenak R., and Arzt E. Thin Solid Films 515 (2007) 7122-7126
18. Ding Y., Kim Y.J., and Erlebacher J. Adv. Mater. 16 (2004) 1897-1900