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Volumn 70, Issue 1, 2004, Pages
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Ab initio study of low-energy electron collisions with tetrafluoroethene C2F4
a a b |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON COLLISION;
ELECTRON CURRENTS;
MOMENTUM TRANSFER;
TETRAFLUOROETHENE;
BOND STRENGTH (CHEMICAL);
CHEMICAL BONDS;
COMPUTER SIMULATION;
ELECTRON ENERGY LEVELS;
GLOBAL WARMING;
IONIZATION;
LIGHT POLARIZATION;
MATHEMATICAL MODELS;
PLASMA ETCHING;
RESONANCE;
SEMICONDUCTOR MATERIALS;
ELECTRON SCATTERING;
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EID: 69649108677
PISSN: 10502947
EISSN: None
Source Type: Journal
DOI: 10.1103/PhysRevA.70.012704 Document Type: Article |
Times cited : (10)
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References (28)
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