MEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrode

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6169, Issue , 2006, Pages

  Lee, Bor Shun ^a   He, Jyun Jhang ^a   Wu, Wen Jong ^a   Shih, Wen Pin ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Interdigital electrode; MEMS generator; PZT deposition

Indexed keywords

CANTILEVER BEAMS; ELECTRODES; ENERGY CONSERVATION; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; SENSORS; WIRELESS TELECOMMUNICATION SYSTEMS;

BEAM STRUCTURES; INTERDIGITAL ELECTRODES; MEMS GENERATORS; PZT DEPOSITION;

ELECTRIC GENERATORS;

EID: 33745840839     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.658584     Document Type: Conference Paper

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