A triangular frequency-tuning comb array

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 62, Issue , 1997, Pages 127-131

  Lee, Ki Bang ^a   Cho, Young Ho ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; NATURAL FREQUENCIES; RESONATORS; TUNING;

TRIANGULAR FREQUENCY TUNING COMB ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 6944255309     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)

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8. Yao, J.J. and MacDonald, N.C., 1996, "A micromachined, single-crystal silicon, tunable resonator," J. Micromech. Microeng., 6, pp.257-264.