INRIM continuous expansion system as high vacuum primary standard for gas pressure measurements below 9 × 10-2 Pa

Vacuum

Volumn 84, Issue 1, 2009, Pages 270-273

  Bergoglio, M ^a   Mari, D ^a  

^a ISTITUTO NAZIONALE DI RICERCA METROLOGICA   (Italy)

Author keywords

Gas flowmeter; High vacuum standard; Orifice conductance

Indexed keywords

ANALYTICAL EVALUATION; GAS FLOW METERS; GAS FLOWMETER; GAS FLOWS; GAS PRESSURE MEASUREMENT; HIGH VACUUM PRIMARY STANDARDS; HIGH VACUUM STANDARD; PRESSURE RANGES; STANDARD UNCERTAINTY; STATE OF THE ART; TRANSITIONAL FLOW; ULTRA HIGH VACUUM; UNCERTAINTY EVALUATION; VOLUME METHOD;

AERODYNAMICS; FLOW MEASUREMENT; FLOW OF GASES; FLOWMETERS; ORIFICES; PRESSURE MEASUREMENT; PRESSURE SENSORS; STANDARDS; VACUUM;

GASES;

EID: 69249210997     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.04.002     Document Type: Article

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