Leak detection, calibrations and reference flows: Practical example

Vacuum

Volumn 81, Issue 11-12, 2007, Pages 1538-1544

  Calcatelli, A ^a   Bergoglio, M ^a   Mari, D ^a  

^a ISTITUTO NAZIONALE DI RICERCA METROLOGICA   (Italy)

Author keywords

Gas flow; Leaks; Mass spectrometer; Vacuum

Indexed keywords

CALIBRATION; FLOW RATE; MASS SPECTROMETRY; ONLINE SYSTEMS; SENSITIVITY ANALYSIS; UNCERTAINTY ANALYSIS;

DIFFUSED LEAK DETECTION METHOD; MASS SPECTROMETER LEAK DETECTORS (MSLD); REFERENCE FLOWS;

LEAK DETECTION;

EID: 34547867754     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.04.019     Document Type: Article

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