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Volumn 34, Issue 2, 2003, Pages 121-132

The IMGC-CNR flowmeter for automatic measurements of low-range gas flows

Author keywords

Automatic control and data acquisition; Flowmeter; Gas flow rates

Indexed keywords

DATA ACQUISITION; LEAKAGE (FLUID); PRESSURE EFFECTS;

EID: 0037810661     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0263-2241(03)00029-0     Document Type: Article
Times cited : (26)

References (13)
  • 1
    • 0000688280 scopus 로고
    • -1
    • -1. Vacuum. 26:(8):1976;321-328.
    • (1976) Vacuum , vol.26 , Issue.8 , pp. 321-328
    • Peggs, G.N.1
  • 2
    • 0027541637 scopus 로고
    • A precision gas flowmeter for vacuum metrology
    • Jousten K., Messer G., Wandrey D. A precision gas flowmeter for vacuum metrology. Vacuum. 44:(2):1993;135-141.
    • (1993) Vacuum , vol.44 , Issue.2 , pp. 135-141
    • Jousten, K.1    Messer, G.2    Wandrey, D.3
  • 6
    • 0026809563 scopus 로고
    • Recommended practices for the calibration and use of leaks
    • Ehrlich C.D., Basford J.A. Recommended practices for the calibration and use of leaks. J. Vac. Sci. Technol. A. 10:(1):1992;1-17.
    • (1992) J. Vac. Sci. Technol. A , vol.10 , Issue.1 , pp. 1-17
    • Ehrlich, C.D.1    Basford, J.A.2
  • 7
    • 0022541005 scopus 로고
    • A note on flow rate and leak rate units
    • Ehrlich C.D. A note on flow rate and leak rate units. J. Vac. Sci. Technol. A. 4:(5):1986;2384-2385.
    • (1986) J. Vac. Sci. Technol. A , vol.4 , Issue.5 , pp. 2384-2385
    • Ehrlich, C.D.1
  • 9
    • 0343777280 scopus 로고    scopus 로고
    • Evaluation of the conductance of the orifice of the new CNR-IMGC dynamic expander
    • Niewinski M., Szwemin P., Calcatelli A., Bergoglio M. Evaluation of the conductance of the orifice of the new CNR-IMGC dynamic expander. Metrologia. 36:(6):1999;555-559.
    • (1999) Metrologia , vol.36 , Issue.6 , pp. 555-559
    • Niewinski, M.1    Szwemin, P.2    Calcatelli, A.3    Bergoglio, M.4
  • 12
    • 0033294878 scopus 로고    scopus 로고
    • The MM1 laser interferometer low-range mercury manometer of the IMGC
    • Alasia F., Capelli A., Cignolo G., Goria R., Sardi M. The MM1 laser interferometer low-range mercury manometer of the IMGC. Metrologia. 36:(6):1999;505-509.
    • (1999) Metrologia , vol.36 , Issue.6 , pp. 505-509
    • Alasia, F.1    Capelli, A.2    Cignolo, G.3    Goria, R.4    Sardi, M.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.