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Volumn 2, Issue 12, 2008, Pages 833-837
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Electrical and dielectric properties of Au/SiO2/n-GaAs (MOS) structures with different oxide layer thickness
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Author keywords
Dielectric properties; Electrical properties; MOS structures; Oxide thickness; Series resistance
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Indexed keywords
DIELECTRIC DEVICES;
DIELECTRIC LOSSES;
DIELECTRIC PROPERTIES;
ELECTRIC PROPERTIES;
ELECTRIC RESISTANCE;
DIELECTRIC CHARACTERISTICS;
DIELECTRIC LOSS TANGENT;
ELECTRICAL AND DIELECTRIC PROPERTIES;
INTERFACIAL OXIDE LAYERS;
MOS STRUCTURE;
OXIDE THICKNESS;
SERIES RESISTANCE VALUES;
SERIES RESISTANCES;
CAPACITANCE;
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EID: 69249116251
PISSN: 18426573
EISSN: 20653824
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (10)
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References (16)
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