Design of precision measurement system for metallic hole

International Journal of Advanced Manufacturing Technology

Volumn 44, Issue 5-6, 2009, Pages 539-547

  Lee, Neville K S ^a   Chow, Jacky K H ^a   Chan, Albert C K ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Capacitive sensor probe; Hole measurement; Multi layers

Indexed keywords

ALIGNMENT MECHANISM; CAPACITIVE SENSOR PROBE; HIGH ASPECT RATIO; HIGH RESOLUTION; HIGH-SPEED; HOLE DIAMETER; HOLE MEASUREMENT; MEASURING METHOD; MEASURING SYSTEMS; NONCONTACT MEASUREMENTS; OPTICAL METHODS; PRECISION MEASUREMENT; SENSOR PROBES; THROUGH HOLE;

ASPECT RATIO; LIGHT TRANSMISSION; MEASUREMENTS; SENSORS;

PROBES;

EID: 69049101238     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-008-1848-z     Document Type: Article

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