New design of cylindrical capacitive sensor for on-line precision control of AMB spindle

IEEE Transactions on Instrumentation and Measurement

Volumn 50, Issue 3, 2001, Pages 757-763

  Jeon, Soo ^a   Ahn, Hyeong Joon ^a   Han, Dong Chul ^a   Chang, In Bae ^b  

^a Seoul National University   (South Korea)

^b Kangwon National University   (South Korea)

Author keywords

Active magnetic bearing (AMB); Cylindrical capacitive sensor (CCS); Geometric error

Indexed keywords

ERROR ANALYSIS; MATHEMATICAL MODELS; PRECISION ENGINEERING; ROTORS; SENSORS;

CYLINDRICAL CAPACITIVE SENSOR; GEOMETRIC ERROR; PRECISION CONTROL;

MAGNETIC BEARINGS;

EID: 0035362090     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.930450     Document Type: Article

References (7)

1. Development of a new measuring method for spindle rotation accuracy by three-points method
2. Roudness measurement by new error separation method
3. A capacitive based ultraprecision spindle error analyzer
4. A study on the performance improvement of a magnetic bearing system using built-in capacitive type transducers
5. Error analysis of the cylindrical capacitive sensor for active magnetic bearing spindles
6. Design of algorithms to extract data from capacitance sensors to measure fastener hole profiles