An infrared imaging method for high-throughput combinatorial investigation of hydrogenation-dehydrogenation and new phase formation of thin films

Review of Scientific Instruments

Volumn 80, Issue 7, 2009, Pages

  Oguchi, H ^a,b,c   Hattrick Simpers, J ^d   Takeuchi, I ^a   Heilweil, E J ^e   Bendersky, L A ^d  

^a UNIVERSITY OF MARYLAND   (United States)

^b TOHOKU UNIVERSITY   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

^d NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^e NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPPING LAYER; COMPOSITION SPREAD; CRITICAL THICKNESS; DEHYDROGENATION PROPERTIES; HIGH-THROUGHPUT; HIGH-THROUGHPUT SCREENING; IN-SITU; INFRARED EMISSIONS; INFRARED IMAGES; INFRARED INTENSITY; MG THIN FILMS; PHASE FORMATIONS; SI SUBSTRATES; THERMALLY OXIDIZED; THICKNESS GRADIENTS;

DEHYDROGENATION; FILM THICKNESS; HYDROGENATION; IMAGING SYSTEMS; INFRARED DEVICES; PALLADIUM; SEMICONDUCTING SILICON COMPOUNDS; THIN FILM DEVICES; THIN FILMS;

THERMOGRAPHY (IMAGING);

EID: 68949092075     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3184024     Document Type: Article

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