A novel fabrication technology for smooth 3D inclined polymer microstructures with adjustable angles

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 821-824

  Hung, Kuo Yung ^a   Hu, Heng Tsang ^a   Tseng, Fan Gang ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Coatings; Fabrication; Microstructure; Mirrors; Optical reflection; Optical refraction; Optical variables control; Polymers; Refractive index; Resists

Indexed keywords

ACTUATORS; ANTIREFLECTION COATINGS; COATINGS; FABRICATION; GLYCEROL; MICROSTRUCTURE; MICROSYSTEMS; MIRRORS; OPTICAL VARIABLES CONTROL; PLASTIC COATINGS; POLYMERS; REFRACTIVE INDEX; TRANSDUCERS;

FABRICATION TECHNOLOGIES; OPTICAL REFLECTION; OPTICAL REFRACTION; POLYMER MICROSTRUCTURES; REFLECTION-INDUCED; REFRACTIVE INDEX DIFFERENCES; RESISTS; THREE-DIMENSIONAL MICROSTRUCTURES;

SOLID-STATE SENSORS;

EID: 3142719116     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215600     Document Type: Conference Paper

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