MEMS-based carbon nanotube and carbon nanofiber Cu micro special electric contact

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Deng, Min ^a   Ding, Guifu ^a   Wang, Yan ^a   Wang, Yuchao ^a   Wang, Hong ^a   Fu, Shi ^a  

^a Shanghai Jiao Tong University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE ELECTROPLATING; COMPOSITE PLATING; ELECTRICAL CONTACT MATERIAL; EROSION BEHAVIOR; EROSION LOSS; MATRIX; MATRIX COMPOSITE; MEMS TECHNOLOGY; PHYSICAL PERFORMANCE; PLATING FILMS; PURE COPPER; SCANNING ELECTRON MICROSCOPE; SEMICONDUCTOR PARAMETER ANALYZERS; TEST RESULTS;

CARBON FILMS; CARBON NANOFIBERS; CARBON NANOTUBES; CAVITY RESONATORS; COPPER; ELECTRIC ARCS; ELECTRIC CONNECTORS; ELECTRIC CONTACTS; ELECTRIC SWITCHGEAR; ELECTROPLATING; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; SCANNING; SCANNING ELECTRON MICROSCOPY; VICKERS HARDNESS; VICKERS HARDNESS TESTING;

COMPOSITE FILMS;

EID: 68849114365     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065001     Document Type: Article

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