Indentation on very smooth silicon wafers

International Journal of Computational Materials Science and Surface Engineering

Volumn 2, Issue 3-4, 2009, Pages 335-341

  Huang, W M ^a   Fan, H ^a   Leng, S C ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Elastic constant; Friction; Hardness; Indentation; Size effect; Surface roughness; Wetting

Indexed keywords

ELASTIC CONSTANTS; FRICTION; HARDNESS; INDENTATION; SURFACE ROUGHNESS; WETTING;

AVERAGE SURFACE ROUGHNESS; INDENTATION TEST; INDENTERS; NEMS DEVICES; SIZE EFFECTS; SURFACE CONDITIONS;

SILICON WAFERS;

EID: 68849088014     PISSN: 17533465     EISSN: 17533473     Source Type: Journal    
DOI: 10.1504/IJCMSSE.2009.027490     Document Type: Article

References (18)

1. Begley, M.R. and Hutchinson, J.W. (1998) 'The mechanics of size-dependent indentation', Journal of the Mechanics and Physics of Solids, Vol. 46, pp.2049-2068.
2. Bei, H., Lu, Z.P. and George, E.P. (2004) 'Theoretical strength and the onset of plasticity in bulk metallic glasses investigated by nanoindentation with a spherical indenter', Physical Review Letters Vol. 93, p.125504.
3. Caceres, D., Vergara, I. and Gonzalez, R. (2002) 'Hardness and elastic modulus from nanoindentations in nominally pure and doped MgO single crystals', Philosophical Magazine A, Vol. 82, pp.1159-1171.
4. Casals, O. and Alcala, J. (2005) 'The duality in mechanical property extractions from Vickers and Berkovich instrumented indentation experiments', Acta Materialia, Vol. 53, pp.3545-3561.
5. Gao, Y.X. and Fan, H. (2002) 'A micro-mechanism based analysis for size-dependent indentation hardness', Journal of Materials Science Vol. 37, pp.1-6.
6. Gouldstone, A., von Vliet, K.J. and Suresh, S. (2001) 'Simulation of defect nucleation in a crystal', Nature, Vol. 411, No. 6838, p.656.
7. Li, H., Ghosh, A., Han, Y.H. and Bradt, R.C. (1993) 'The frictional component of the indentation size effect in low load microhardness testing', Journal of Materials Research, Vol. 8, pp.1028-1032.
8. Mata, M. and Alcala, J. (2004) 'The role of friction on sharp indentation', Journal of the Mechanics and Physics of Solids, Vol. 52, pp.145-165.
9. Moreau, P., Raulic, M., P'ng, K.M., Gannaway, G., Anderson, P., Gillin, W.P., Bushby, A.J. and Dunstan, D.J. (2005) 'Measurement of the size effect in the yield strength of nickel foils', Philosophical Magazine Letters, Vol. 85, pp.339-343.
10. Myers, D. (1999) Surfaces, Interfaces, and Colloids: Principles and Applications, 2nd edition, New York: John Wiley & Sons, Inc.
11. Nix, W.D. and Gao, H. (1998) 'Indentation size effects in crystalline materials: A law for strain gradient plasticity, Journal of the Mechanics and Physics of Solids, Vol. 46, pp.411-425.
12. Oliver, W.C. and Pharr, G.M. (1992) 'An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments', Journal of Materials Research, Vol. 7, pp.1564-1583.
13. Oliver, W.C. and Pharr, G.M. (2004) 'Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology', Journal of Materials Research, Vol. 19, pp.3-20.
14. Saraev, D. and Miller, R.E. (2005) 'Atomic-scale simulations of nanoindentation-induced plasticity in copper crystals with nanometer-sized nickel coatings', Acta Materialia, Vol. 54, pp.33-45.
15. Smith, G.S., Tadmor, E.B. and Kaxiras, E. (2000) 'Multiscale simulation of loading and electrical resistance in silicon nanoindentation', Physical Review Letters, Vol. 84, pp.1260-1263.
16. Tsui, T.Y., Oliver, W.C. and Pharr, G.M. (1996) 'Influences of stress on the measurement of mechanical properties using nanoindentation: Part I. Experimental studies in an aluminum alloy', Journal of Materials Research, Vol. 11, pp.752-759.
17. Yan, J.W., Takahashi, H., Tamaki, J., Gai, X.H., Harada, H. and Pattern, J. (2005) 'Nanoindentation tests on diamond-machined silicon wafers', Applied Physics Letters, Vol. 86, p.181913.
18. Zhang, T., Hua, W. and Zhao, M. (2004) 'The role of plastic deformation of rough surfaces in the size-dependent hardness', Acta Materialia Vol. 52, pp.57-68.