Incorporation of hydrogen in diamond thin films

Diamond and Related Materials

Volumn 18, Issue 10, 2009, Pages 1247-1252

  Rakha, Sobia Allah ^a   Jianqing, Cao ^a   Huihao, Xia ^a   Guojun, Yu ^a   Zhu, Dezhang ^a   Gong, Jinlong ^a  

^a SHANGHAI INSTITUTE OF APPLIED PHYSICS   (China)

Author keywords

CVD diamond films; ERDA; Grain size dependence; Hydrogen; RS; XPS

Indexed keywords

CVD DIAMOND FILMS; ERDA; GRAIN SIZE DEPENDENCE; RS; XPS;

CHEMICAL VAPOR DEPOSITION; CRYSTALLITE SIZE; DEPOSITION; DIAMOND CUTTING TOOLS; DIAMONDS; FILAMENTS (LAMP); FILM GROWTH; GRAIN GROWTH; GRAIN SIZE AND SHAPE; HYDROGEN; NANOCRYSTALLINE MATERIALS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; RAPID SOLIDIFICATION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND FILMS;

EID: 68749118176     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2009.04.009     Document Type: Article

References (46)

1. Stavrides A., Ren J., Ho M., and Chem J. Thin Solid Films 335 (1998) 27
2. Banholzer W. Surf. Coat. Technol. 53 (1992) 1
3. Anthony T.R. Vacuum 41 (1990) 1356
4. Cui B., Ristein J., and Ley L. Phys. Rev. Lett. 81 (1998) 429
5. Hayashi K., Amanaka S.Y., Watanabe H., Sekiguchi T., Okushi H., and Kajimura K. J. Appl. Phys. 81 (1997) 744
6. Hoffman A., Heiman A., Akhvlediani R., Lakin E., Zolotoyabko E., and Cyterman C. J. Appl. Phys. 94 (2003) 4589
7. Titus E., Misra D.S., Sikder A.K., Tyagi P.K., Singh M.K., Misra A.b.h.a., Ali N., Cabral G., Neto V.F., and Gracio J. Diamond Relat. Mater. 14 (2005) 476
8. Reichart P., Datzmann G., Hauptner A., Hertenberger R., Wild C., and Dollingeer G. Science 306 (2004) 1537
9. Talbot-Ponsonby D.F., Newton M.E., Baker J.M., Scarsbrook G.A., Sussmann R.S., Whitehead A.J., and Pfenningen S. Phys. Rev. B 57 (1998) 2264
10. Maclear R.D., Butler J.E., Connell S.H., Doyle B.P., Machi I.Z., Rebuli D.B., Sellschop J.P.F., and Sideras-Haddad E. Diamond Relat. Mater. 8 (1999) 1615
11. Tang C.J., Neves A.J., Neto M.A., and Fernandes A.J.S. Diamond Relat. Mater. 13 (2004) 769
12. McNamara K.M., Levy D.H., Gleason K.K., and Robinson C.J. Appl. Phys. Lett. 60 (1992) 580
13. Maclear R.D., Butler J.E., Connell S.H., Doyle B.P., Machi I.Z., Rebuli D.B., Sellschop J.P.F., and Sideras-Haddad E. Diamond Relat. Mater. 8 (1999) 1615
14. Kimura A., Nakatani Y., Yamada K., and Suzuki T. Diamond Relat. Mater. 8 (1999) 37
15. Zorman C.A., Mearini G.T., and Hoffman R.W. Diamond Relat. Mater. 9 (2000) 1518
16. Michaelson S.h., and Hoffman A. Diamond Relat. Mater. 14 (2005) 470
17. Michaelson S.h., Lifshitz Y., Ternyak O., Akhvlediani R., and Hoffman A. Diamond Relat. Mater. 16 (2007) 845
18. Ballutaud D., Kociniewski T., Vigneron J., Simon N., and Girard H. Diamond Relat. Mater. 17 (2008) 1127
19. Manfredotti C., Fizzotti F., Lo Giudice A., Manfredotti C.h., Castellino M., Bonino P., and Vittone E. Diamond Relat. Mater. 17 (2008) 1154
20. Rakha S.A., Yang S., He Z., Ahmed I., and Gong J.L. Curr. Appl. Phys. 9 (2008) 698
21. ERD simulation package provided by courtesy of Dr. Williams Lennard at The University of Western Ontario.
22. LeGrice Y.M., Nemanich R.J., Glass J.T., Lee Y.H., Rudder R.A., and Markunas R.J. Mater. Res. Symp. Proc. 62 (1990) 219
23. Shroder R.E., Nemanich R.J., and Glass J.T. Phys. Rev. B 41 (1990) 3738
24. Nemanich R.J., Glass J.T., and Lucovsky G. J. Vac. Sci. Technol. A 6 (1988) 1783
25. Ferrari A.C., and Robertson J. Phys. Rev., B 63 (2001) 121405R
26. Pfeiffer R., Kuzmany H., Knoll P., Bokova S., Salk N., and Günther B. Diamond Relat. Mater. 12 (2003) 268
27. Kuzmany H., Pfeiffer R., Salk N., and Günther B. Carbon 42 (2004) 911
28. Birrell J., Gerbib J.E., and Auciello O. Diamond Relat. Mater. 14 (2005) 86
29. Sowers A.T., Ward B.L., English S.L., and Nemanich R.J. J. Appl. Phys. 86 (1999) 3973
30. Yarbrough W.A., and Messier R. Science 247 (1990) 688
31. Dotter W., Erz R., Jung K., and Ehrhardt H. Proceedings of the Third International Symposium on Diamond Materials (1993), The Electrochemical Society, Pennington, NJ 746
32. Nemanich R.J., Glass J.T., Lucovsky G., and Shroder R.E. J. Vac. Sci. Technol. A 6 (1988) 1783
33. Bergman L., Turner K.F., Morrison P.W., and Nemanich R.J. In: Feldman A., Tzeng Y., Yarbrough W.A., Yoshikawa M., and Murakawa M. (Eds). Proc. 3rd Int. Conf. on Applications of Diamond Films and Related Materials NIST Spec. Publ., I, bl. 885, NIST, Gatthersburg, MD vol. 453 (1995)
34. Zhu W., Randall C.A., Badzian A.R., and Messier R. J. Vac. Sci. Technol. A 7 (1989) 2315
35. Beeman D., Silverman J., Lynds R., and Anderson M.R. Phys. Rev. B 5 (1972) 4951
36. Lifshitz Y., Kohler T.h., Frauenheim T.h., Guzmann I., Hoffman A., Zhang R.Q., Zhou X.T., and Lee S.T. Science 297 (2002) 1531
37. Goeting C.H., Marken F., and Sosa G. Diamond Relat. Mater. 9 (2000) 390
38. Beamson G., and Briggs D. High Resolution XPS of Organic Polymers, The Scienta ESCA00 Database (1992), Wiley, Chichester, UK
39. Haasz A.A., Chiu S., and Pierre J.E. J. Vac. Sci. Technol. A 14 (1996) 184
40. Ballutaud D., Simon N., Girard H., Rzepka E., and Bouchet-Fabre B. Diamond Relat. Mater. 15 (2006) 716
41. Ferro S., Dal Colle M., and De Battisti A. Carbon 50 (2005) 1191
42. Kimura A., Nakatani Y., Yamada K., and Suzuki T. Diamond Relat. Mater. 8 (1999) 37
43. Lifshitz Y., Kasi S.R., and Rabalais J.W. Phys. Rev. Lett. 62 (1989) 1290
44. Lifshitz Y., Meng X.M., Lee S.T., Akhveldiany R., and Hoffman A. Phys. Rev. Lett. 93 (2004) 056101-1
45. Chen K.H., Chuang M.C., Penney C.M., and Banholzer W.F. J. Appl. Phys. 71 (1992) 1485
46. Titus E., Ali a N., Cabral G., and Madaleno J.C. Thin Solid Films 515 (2006) 201