Thermo-oxidative erosion of amorphous hydrogenated carbon films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 184-193

  Haasz, A A ^a   Chiu, S ^a   Pierre, J E ^a   Gudimenko, Y I ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS; CARBON; EROSION; FILMS; HYDRONATED; THERMO-OXIDATIVE;

EID: 0029672331     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579916     Document Type: Article

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