Thickness controlled and smooth polycrystalline CVD diamond film deposition on SiO2 with electrostatic self assembly seeding process

Diamond and Related Materials

Volumn 18, Issue 10, 2009, Pages 1218-1222

  Kim, J H ^a   Lee, S K ^a   Kwon, O M ^a   Hong, S I ^a   Lim, D S ^a  

^a Korea University   (South Korea)

Author keywords

Electrostatic self assembly; Hot filament CVD; Nano diamond; Thickness control

Indexed keywords

COATED SURFACE; CVD DIAMOND FILMS; DIAMOND PARTICLES; ELECTROSTATIC SELF ASSEMBLY; ELECTROSTATIC SELF-ASSEMBLY METHODS; HIGH DENSITY; HOT FILAMENT CVD; INCUBATION TIME; LINEAR GROWTH RATE; MECHANICAL DAMAGES; MONO-DISPERSED; NANO DIAMOND; POLYCRYSTALLINE CVD DIAMOND; SEEDING LAYERS; SEEDING PROCESS; SUBMICROMETERS; THICKNESS UNIFORMITY; VISIBLE FRINGES;

CHEMICAL VAPOR DEPOSITION; DIAMOND CUTTING TOOLS; DIAMOND DEPOSITS; DIAMONDS; ELECTROSTATICS; FILAMENTS (LAMP); OXIDE FILMS; SELF ASSEMBLY; SILICON COMPOUNDS; SILICON OXIDES; SURFACE ROUGHNESS; THICKNESS CONTROL;

DIAMOND FILMS;

EID: 68749095726     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2009.04.012     Document Type: Article

References (15)

1. Greier N.R., Phillips D.S., Johnson J.D., and Volk F. Nature 333 (1988) 440
2. Liu K.-K., Cheng C.-L., Chang C.-C., and Chao J.-I. Nanotechnology 18 (2007) 455701
3. Krueger A. Chem. Eur. J. 14 (2008) 1382
4. Arkhipov A.V., Gordeev S.K., Korchagina S.B., Sominski G.G., and Uvarov A.A. J. Phys.: Conf. Ser. 100 (2008) 072047
5. D.P. Lim, J.Y. Lee, D.S. Lim, S.G. Ahn, I.W. Lyo, J. Nanosci. Nanotechnol. 9 (2009) 4197.
6. Iijima S., and Ichihashi T. Nature 356 (1992) 776
7. Ralchenko V., Saveliev A., Voronina S., Dementjev A., Maslakov K., Salerno M., Podesta A., and Milani P. In: Gruen D.M., Shenderova O.A., and Vul A.Ya. (Eds). Synthesis, Properties and Applications of Ultrananocrystalline Diamond. Followed by NATO Science Series II: Mathematics, Physics and Chemistry vol. 192 (2005), Springer, Netherlands 109
8. Eliyahu A., Buehler J., Ben-Chorin M., Cohen H., and Prior Y. Diamond Relat. Mater. 8 (1999) 146
9. Arnault J.C., Saada S., Nesladek M., Williams O.A., Haenen K., Bergonzo P., and Osawa E. Diamond Relat. Mater. 17 (2008) 1143
10. Willams O.A., Douheret O., Daenen M., Haenen K., Osawa E., and Takahashi M. Chem. Phys. Lett. 445 (2007) 255
11. Williams O.A., Nesladek M., Daenen M., Michaelson S., Hoffman A., Osawa E., Haenen K., and Jackman R.B. Diamond Relat. Mater. 17 (2008) 1080
12. Iler R.K. J. Colloid Interface Sci. 21 (1966) 569
13. Klapetek P., Ohlidal I., and Bilek J. Ultramicroscopy 102 (2004) 51
14. Bukharaev A.A., Berdunov N.V., Ovchinnikov D.V., and Salikhov K.M. Scanning Microsc. 12 (1998) 225
15. Chena Q., and Yun S. Mater. Res. Bull. 35 (2000) 1915