Influence of the pulse number and fluence of a nanosecond laser on the ablation rate of metals, semiconductors and dielectrics

EPJ Applied Physics

Volumn 47, Issue 3, 2009, Pages

  Vladoiu, I ^a   Stafe, M ^a   Negutu, C ^a   Popescu, I M ^a  

^a UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION RATES; ATMOSPHERIC CONDITIONS; DIELECTRIC TARGETS; FLUENCES; IRRADIATED AREA; LASER FLUENCES; NANOSECOND LASERS; ONE-DIMENSIONAL; PHASE EXPLOSION; PULSE NUMBER; PULSED LASER ABLATION; TARGET SURFACE; THRESHOLD FLUENCES; VAPORISATION; WIDE BAND GAP;

DIELECTRIC MATERIALS; FLUID DYNAMICS; LASER ABLATION; LASERS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR LASERS; TARGETS;

PULSED LASER APPLICATIONS;

EID: 68349135024     PISSN: 12860042     EISSN: 12860050     Source Type: Journal    
DOI: 10.1051/epjap/2009100     Document Type: Article

References (31)

1. D. Bauerle, Laser processing and chemistry (Springer-Verlag, Berlin, Heidelberg, New York, 2000)
2. I.M. Popescu et al., Aplicatii ale laserelor, (Tehnica, Bucharest, 1979), in Romanian
3. M. von Allemen, A. Blatter, Laser-Beam Interaction with Materials (Springer-Verlag, Berlin, Heidelberg, 1995)
4. D. Bauerle (Ed.), Laser Processing and Diagnostics, Proc. Int. Conf., University of Linz, Austria, in Springer Series Chem. Phys. 39 (Springer-Verlag, Berlin, 1984)
5. J.F. Ready, Effects of High-power Laser Radiation (Academic Press, New York, London, 1971)
6. I. Ursu, I.N. Mihailescu, A.M. Prokhorov, V.I. Konov, Interactiunea radiatiei laser cu metalele (Editura Academiei R.S.R., Bucharest, 1986), in Romanian
7. P. Simon, J. Ihlemann, Appl. Phys. A 63, 505 (1996)
8. Laser Ablation and Desorption. Experimental Methods in the Physical Sciences, Vol. 30, edited by J.C. Miller, R.F. Haglund (Academic Press, New York, 1998)
9. S.I. Anisimov, B.S. Lukyanchuk, Physics-Uspekhi 45, 293 (2002)
10. Laser ionization mass analysis, edited by A. Vertes, R. Gijbels, F. Adams (John Wiley & Sons, New York, 1993)
11. M. Stafe, I. Vladoiu, I.M. Popescu, Cent. Eur. J. Phys. 6, 327 (2008)
12. N.M. Bulgakova, A.V. Bulgakov, Appl. Phys. A 73, 199 (2001)
13. S. Amoruso, R. Bruzzese, N. Spinelli, R. Velotta, J. Phys. B 32, R131 (1999)
14. S. Amoruso, M. Armenante, V. Berardi, R. Bruzzese, N. Spinelli, R. Velotta, Appl. Phys. A 65, 265 (1997)
15. B. Wolff-Rottke, J. Ihlemann, H. Schmidt, Appl. Phys. A 60, 131 (1995)
16. A. Bogaerts, Z. Chen, Spectrochim. Acta B 60, 1280 (2005)
17. M. Stafe, C. Negutu, I.M. Popescu, Shock Waves 14, 123 (2005)
18. M. Stafe, C. Negutu, I.M. Popescu, Appl. Surf. Sci. 253, 6353 (2007)
19. B. Garrison, T. Itina, L. Zhigilei, Phys. Rev. E 68, 041501 (2003)
20. E.G. Gamaly, A.V. Rode, A. Perrone, A. Zocco, Appl. Phys. A 73, 143 (2001)
21. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermannet, Appl. Phys. A 63, 109 (1996)
22. A.E. Wynne, B.C. Stuart, Appl. Phys. A 76, 373 (2003)
23. S.M. Klimentov, S.V. Garnov, V.I. Konov, T.V. Kononenko, P.A. Pivovarov, O.G. Tsarkova, D. Breitling, F. Dausinger, Phys. Wave Phenomena 15, 1 (2007)
24. C. Porneala, D.A. Willis, Appl. Phys. Lett. 89, 211121 (2006)
25. J.M. Fishburn, M.J. Withford, D.W. Coutts, J.A. Piper, Appl. Opt. 43, 6473 (2004)
26. M.H.R. Knowles, G. Rutterford, D. Karnakis, A. Ferguson, Int. J. Adv. Manuf. Technol. 33, 95 (2007)
27. A. Semerok, C. Chaleard, V. Detalle, J.L. Lacour, P. Mauchien, P. Meynadier, C. Nouvellon, B. Salle, P. Palianov, M. Perdrix, G. Petite, Appl. Surf. Sci.138-139, 311 (1999)
28. CRC Handbook of Chemistry and Physics, 82nd edn. (CRC Press, Boca Raton, FL, 2001)
29. Q. Lu, Phys. Rev. E 67, 016410 (2003)
30. J.S. Cowpe, J.S. Astin, R.D. Pilkington, A.E. Hill, Spectrochim. Acta Part B: At. Spectrosc. 63, 1066 (2008)
31. F.J. Gordillo-Vazquez, A. Perea, J.A. Chaos, J. Gonzalo, C.N. Afonso, Appl. Phys. Lett. 78, 7 (2001)