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Applied Physics Letters

Volumn 95, Issue 5, 2009, Pages

Low temperature preparation of ferroelectric bismuth titanate thin films

(3) Xue, Kan Hao a Celinska, Jolanta b Paz De Araujo, Carlos A a,b

a University of Colorado at Colorado Springs (United States)

b Symetrix Corporation (United States)

Author keywords

[No Author keywords available]

Indexed keywords

65NM TECHNOLOGY; BISMUTH TITANATE; BISMUTH TITANATE THIN FILMS; FERROELECTRIC CAPACITORS; FERROELECTRIC MEMORY; INTERCONNECT MATERIALS; LOW TEMPERATURE PREPARATION; LOW TEMPERATURES; LOW-TEMPERATURE PROCESS; METAL ORGANIC DECOMPOSITION TECHNIQUES; NICKEL SILICIDE;

BISMUTH; CAPACITORS; DECOMPOSITION; FERROELECTRIC DEVICES; FERROELECTRICITY; FILM PREPARATION; ORGANOMETALLICS; PLATINUM; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SEMICONDUCTING BISMUTH COMPOUNDS; SILICIDES; THIN FILMS;

FERROELECTRIC FILMS;

EID: 68349133384 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3204002 Document Type: Article

Times cited : (19)

References (14)

1
- 35348846979
- 0036-8075,. 10.1126/science.246.4936.1400
- J. F. Scott and C. A. Paz de Araujo, Science 0036-8075 246, 1400 (1989). 10.1126/science.246.4936.1400
- (1989) Science , vol.246 , pp. 1400
- Scott, J.F.¹ Paz De Araujo, C.A.²

2
- 68349144394
- International Technology Roadmafor Semiconductors.
- International Technology Roadmap for Semiconductors 2007.
- (2007)

3
- 68349158642
- 15th International Symposium on Applications of Ferroelectrics (ISAF'06) Proceedings, Sunset Beach, USA, (unpublished),.
- Y. Kato, H. Tanaka, K. Isogai, K. Kaibara, Y. Kaneko, Y. Shimada, M. Brubaker, J. Celinska, L. D. McMillan, and C. A. Paz de Araujo, 15th International Symposium on Applications of Ferroelectrics (ISAF'06) Proceedings, Sunset Beach, USA, 2006 (unpublished), p. 81.
- (2006) , pp. 81
- Kato, Y.¹ Tanaka, H.² Isogai, K.³ Kaibara, K.⁴ Kaneko, Y.⁵ Shimada, Y.⁶ Brubaker, M.⁷ Celinska, J.⁸ McMillan, L.D.⁹ Paz De Araujo, C.A.¹⁰

4
- 0032482808
- 0040-6090,. 10.1016/S0040-6090(98)00547-1
- D. -X. Xu, S. R. Das, C. J. Peters, and L. E. Erickson, Thin Solid Films 0040-6090 326, 143 (1998). 10.1016/S0040-6090(98)00547-1
- (1998) Thin Solid Films , vol.326 , pp. 143
- Xu, D.-X.¹ Das, S.R.² Peters, C.J.³ Erickson, L.E.⁴

5
- 84963187092
- 0015-0193.
- R. W. Whatmore, P. C. Osbond, and N. M. Shorrocks, Ferroelectrics 0015-0193 76, 351 (1987).
- (1987) Ferroelectrics , vol.76 , pp. 351
- Whatmore, R.W.¹ Osbond, P.C.² Shorrocks, N.M.³

6
- 0030082912
- Ferroelectric materials for electromechanical transducer applications
- DOI 10.1016/0254-0584(95)01617-4
- L. E. Cross, Mater. Chem. Phys. 0254-0584 43, 108 (1996). 10.1016/0254-0584(95)01617-4 (Pubitemid 126341260)
- (1996) Materials Chemistry and Physics , vol.43 , Issue.2 , pp. 108-115
- Cross, L.E.¹

7
- 0029290956
- 0028-0836,. 10.1038/374627a0
- C. A.-Paz de Araujo, J. D. Cuchiaro, L. D. McMillan, M. C. Scott, and J. F. Scott, Nature (London) 0028-0836 374, 627 (1995). 10.1038/374627a0
- (1995) Nature (London) , vol.374 , pp. 627
- De Araujo, C.A.-P.¹ Cuchiaro, J.D.² McMillan, L.D.³ Scott, M.C.⁴ Scott, J.F.⁵

8
- 21544468235
- 0021-8979,. 10.1063/1.1656542
- S. E. Cummins and L. E. Cross, J. Appl. Phys. 0021-8979 39, 2268 (1968). 10.1063/1.1656542
- (1968) J. Appl. Phys. , vol.39 , pp. 2268
- Cummins, S.E.¹ Cross, L.E.²

9
- 0000397867
- 0003-6951,. 10.1063/1.109547
- P. C. Joshi and S. B. Krupanidhi, Appl. Phys. Lett. 0003-6951 62, 1928 (1993). 10.1063/1.109547
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1928
- Joshi, P.C.¹ Krupanidhi, S.B.²

10
- 0033554712
- Lanthanum-substituted bismuth titanate for use in non-volatile memories
- DOI 10.1038/44352
- B. H. Park, B. S. Kang, S. D. Bu, T. W. Noh, J. Lee, and W. Jo, Nature (London) 0028-0836 401, 682 (1999). 10.1038/44352 (Pubitemid 29485209)
- (1999) Nature , vol.401 , Issue.6754 , pp. 682-684
- Park, B.H.¹ Kang, B.S.² Bu, S.D.³ Noh, T.W.⁴ Lee, J.⁵ Jo, W.⁶

11
- 79956060203
- 12 epitaxial thin films grown by metalorganic chemical vapor deposition
- DOI 10.1063/1.1468914
- T. Kojima, T. Sakai, T. Watanabe, H. Funakuboa, K. Saito, and M. Osada, Appl. Phys. Lett. 0003-6951 80, 2746 (2002). 10.1063/1.1468914 (Pubitemid 34573544)
- (2002) Applied Physics Letters , vol.80 , Issue.15 , pp. 2746
- Kojima, T.¹ Sakai, T.² Watanabe, T.³ Funakubo, H.⁴ Saito, K.⁵ Osada, M.⁶

12
- 0037135775
- 0031-9007,. 10.1103/PhysRevLett.89.087601
- U. Chon, H. M. Jang, M. G. Kim, and C. H. Chang, Phys. Rev. Lett. 0031-9007 89, 087601 (2002). 10.1103/PhysRevLett.89.087601
- (2002) Phys. Rev. Lett. , vol.89 , pp. 087601
- Chon, U.¹ Jang, H.M.² Kim, M.G.³ Chang, C.H.⁴

13
- 23844441559
- 12 films
- DOI 10.1063/1.1984073, 024110
- T. Watanabe, H. Funakuboa, M. Osada, H. Uchida, and I. Okada, J. Appl. Phys. 0021-8979 98, 024110 (2005). 10.1063/1.1984073 (Pubitemid 41144563)
- (2005) Journal of Applied Physics , vol.98 , Issue.2 , pp. 1-6
- Watanabe, T.¹ Funakubo, H.² Osada, M.³ Uchida, H.⁴ Okada, I.⁵

14
- 36448999568
- 0003-6951,. 10.1063/1.112032
- H. -J. Cho, W. Jo, and T. W. Noh, Appl. Phys. Lett. 0003-6951 65, 1525 (1994). 10.1063/1.112032
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1525
- Cho, H.-J.¹ Jo, W.² Noh, T.W.³

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