Application of dry film resist in the fabrication of microfluidic chips for droplet generation

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Leech, P W ^a   Wu, N ^a   Zhu, Y ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DROPLET GENERATION; DRY FILM RESIST; FILM TRANSPARENCY; FLOW PARAMETERS; FOCUSING DEVICE; MICROFLUIDIC CHIP; OIL/WATER; PLEXIGLAS; PROTOTYPE DEVICES; RAPID FABRICATION; RESOLUTION LIMITS; TRANSPARENCY MASKS;

CHROMIUM; ELECTRON BEAMS; TRANSPARENCY;

DROP FORMATION;

EID: 68249146524     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065019     Document Type: Article

References (17)

1. Huebner A, Sharma S, Srisa-Art M, Hollfelder F, Ebel J B and deMello A J 2008 Lab Chip 8 1244
2. Link D R, Anna S L, Weitz D A and Stone H A 2004 Phys. Rev. Lett. 92 054503
3. Thorsen T, Roberts R W, Arnold F H and Quake S R 2001 Phys. Rev. Lett. 86 4163
4. Joanicot M and Ajdari A 2005 Science 309 887
5. Fidalgo L M, Whyte G, Bratton D, Kaminski C F, Abell C and Huck W T S 2008 Angew. Chem. Int. Ed. 47 2042
6. Courtois F, Olguin L F, Whyte G, Bratton D, Huck W T S, Abell C and Hollfelder F 2008 Chem. Biochem. 9 439
7. Christopher G F and Anna S L 2007 J. Phys. D: Appl. Phys. 40 R319
8. Millman J R, Bhatt K H, Prevo B G and Velev O D 2004 Nature Mater. 4 98
9. Miller O J, Bernath K, Agresti J J, Amitai G, Kelly B T, Mastrobattista E, Tally V, Magdassi S, Tawfik D S and Griffiths A D 2006 Nature Methods 3 561
10. Ong W-L, Hua J, Zhang B, Teo T-Y, Zhuo J, Nguyen N-T, Ranganathan N and Yobas L 2007 Sensors Actuators A 138 203
11. Lorenz H, Paratte L, Luthier R, de Rooij N F and Renaud P 1996 Sensors Actuators A 53 364
12. Stephan K, Pittet P, Renaud L, Kleimann P, Morin P, Ouaini K and Ferrigno R 2007 J. Micromech. Microeng. 17 N69
13. Tsai Y-C, Jen H-P, Lin K-W and Hsieh Y-Z 2006 J. Chromatogr. A 1111 267
14. Vulto P, Glade N, Altomare L, Bablet J, Del Tin L, Medoro G, Chartier I, Manaresi N, Tartagni M and Guerrieri R 2005 Lab Chip 5 158
15. Leech P W and Lee R A 2007 J. Mater. Sci. 42 4428
16. Piruska A, Nikcevik I, Lee S H, Ahn C, Heinman W R, Limbach P A and Seliskar C J 2005 Lab Chip 5 1348
17. Zhao S, Cong H and Pan T 2009 Lab Chip 9 1128