Combined reflectometry-ellipsometry technique to measure graphite down to monolayer thickness

Solid State Technology

Volumn 52, Issue 6, 2009, Pages 18-21

  Wang, Wei E ^a   Balooch, M ^b   Claypool, C ^c   Zawaideh, M ^c   Famaam, K ^c  

^a IMEC   (Belgium)

^b Scientific Computing International ^*

^c Scientific Computing International   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENT MATERIALS; GRAPHENES; MONOLAYER THICKNESS; MULTI-ANGLE; NONDESTRUCTIVE METHODS; POLARIZED LIGHT; REFLECTOMETRY; SINGLE LAYER; VARIOUS SUBSTRATES;

BIREFRINGENCE; ELECTRONIC PROPERTIES; ELLIPSOMETRY; LIGHT MEASUREMENT; LIGHT TRANSMISSION; MONOLAYERS; REFLECTION; REFLECTOMETERS;

GRAPHITE;

EID: 68249127362     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

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