SCOPUS 정보 검색 플랫폼

Optics Letters

Volumn 34, Issue 15, 2009, Pages 2378-2380

Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process

(4) Sun, Rong a Cheng, Jing a Michel, Jurgen a Kimerling, Lionel a

a Massachusetts Institute of Technology (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUDGET CONTROL; LIGHT TRANSMISSION; PLASMA FILLED WAVEGUIDES; RESONATORS; SILICON; WAVEGUIDES;

AMORPHOUS SILICON (A-SI); DAMASCENE PROCESS; HYDROGEN ENCAPSULATION; OPTICAL CHANNEL WAVEGUIDE; PROCESS INTEGRATION; RACETRACK RESONATORS; SINGLE CRYSTALLINE SILICON; TRANSMISSION LOSS;

AMORPHOUS SILICON;

EID: 68149123322 PISSN: 01469592 EISSN: 15394794 Source Type: Journal
DOI: 10.1364/OL.34.002378 Document Type: Article

Times cited : (30)

References (6)

1
- 0032166781
- P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni, IBM J. Res. Dev. 42, 567 (1998).
- (1998) IBM J. Res. Dev , vol.42 , pp. 567
- Andricacos, P.C.¹ Uzoh, C.² Dukovic, J.O.³ Horkans, J.⁴ Deligianni, H.⁵

2
- 46349093650
- J. F. Liu, M. Beals, A. Pomerene, S. Bernardis, R. Sun, J. Cheng, L. C. Kimerling, and J. Michel, Nature Photonics 2, 433 (2008).
- (2008) Nature Photonics , vol.2 , pp. 433
- Liu, J.F.¹ Beals, M.² Pomerene, A.³ Bernardis, S.⁴ Sun, R.⁵ Cheng, J.⁶ Kimerling, L.C.⁷ Michel, J.⁸

3
- 49149088116
- R. Sun, M. Beals, A. Pomerene, J. Cheng, C. Hong, L. Kimerling, and J. Michel, Opt. Express 16, 11682 (2008).
- (2008) Opt. Express , vol.16 , pp. 11682
- Sun, R.¹ Beals, M.² Pomerene, A.³ Cheng, J.⁴ Hong, C.⁵ Kimerling, L.⁶ Michel, J.⁷

4
- 64349097541
- R. Sun, K. McComber, J. Cheng, D. K. Sparacin, M. Beals, J. Michel, and L. C. Kimerling, Appl. Phys. Lett. 94, 141108 (2009).
- (2009) Appl. Phys. Lett , vol.94 , pp. 141108
- Sun, R.¹ McComber, K.² Cheng, J.³ Sparacin, D.K.⁴ Beals, M.⁵ Michel, J.⁶ Kimerling, L.C.⁷

5
- 78649730377
- IEEE
- D. K. Sparacin, R. Sun, A. Agarwal, M. Beals, J. Michel, T. Conway, A. Pomerene, D. Carothers, M. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, A. E. White, and L. C. Kimerling, in Proceedings of the Third IEEE International Conference on Group IV Photonics (IEEE, 2006), pp. 255-257.
- (2006) Proceedings of the Third IEEE International Conference on Group IV Photonics , pp. 255-257
- Sparacin, D.K.¹ Sun, R.² Agarwal, A.³ Beals, M.⁴ Michel, J.⁵ Conway, T.⁶ Pomerene, A.⁷ Carothers, D.⁸ Grove, M.⁹ Gill, D.M.¹⁰ Rasras, M.S.¹¹ Patel, S.S.¹² White, A.E.¹³ Kimerling, L.C.¹⁴

6
- 0010692542
- A. Yariv, Electron. Lett. 36, 32 (2000).
- (2000) Electron. Lett , vol.36 , pp. 32
- Yariv, A.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.