Carbon-nanotube growth in alcohol-vapor plasma

IEEE Transactions on Plasma Science

Volumn 37, Issue 7 SPEC. ISS. PART 1, 2009, Pages 1150-1155

  Suda, Yoshiyuki ^a,b   Okita, Atsushi ^a,c   Takayama, Junichi ^a   Oda, Akinori ^d   Sugawara, Hirotake ^a   Sakai, Yosuke ^a   Oke, Shinichiro ^b   Takikawa, Hirofumi ^b  

^a HOKKAIDO UNIVERSITY   (Japan)

^b TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^c HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

^d NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Carbon nanotube (CNT); Ferrocene; Mass spectrometry; Optical emission spectroscopy (OES); Plasma enhanced chemical vapor deposition (PECVD)

Indexed keywords

ALCOHOL CVD; CARBON NANO PARTICLES; DECOMPOSITION REACTION; EMISSION PEAKS; EXCITATION STATE; EXPERIMENTAL CONDITIONS; FE CATALYST; FERROCENE; GASPHASE; NANOTUBE GROWTH; OPTICAL-EMISSION SPECTROSCOPY (OES); PLASMA PROPERTIES; PLASMA SPECIES; PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); PROCESS CONDITION; QUADRUPOLE MASS SPECTROMETRY; REDUCTANTS; SI SUBSTRATES; VERTICALLY ALIGNED;

AROMATIC HYDROCARBONS; CARBON NANOTUBES; EMISSION SPECTROSCOPY; IRON COMPOUNDS; LEAKAGE (FLUID); MASS SPECTROMETERS; MASS SPECTROMETRY; OPTICAL EMISSION SPECTROSCOPY; OPTICAL PROPERTIES; PLASMA DEPOSITION; PLASMAS; VAPORS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 67949109550     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2009.2015451     Document Type: Article

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