Effect of electrical properties of platinum palladium oxide thin films on the optical properties

Journal of the Vacuum Society of Japan

Volumn 52, Issue 3, 2009, Pages 163-166

  Iwai, Yuki ^a   Nakagawa, Koichi ^a   Miura, Noboru ^a   Matsumoto, Setsuko ^a   Nakano, Ryotaro ^a   Matsumoto, Hironaga ^a  

^a MEIJI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; OPTICAL PROPERTIES; OXIDE FILMS; PLATINUM; REACTIVE SPUTTERING; SPUTTER DEPOSITION; THIN FILMS;

ABSORPTION CO-EFFICIENT; FREE CARRIER ABSORPTION; HIGH QUALITY; NEAR ULTRAVIOLET; PALLADIUM OXIDES; PD TARGET; REACTIVE CO-SPUTTERING;

OPTICAL FILMS;

EID: 67651154231     PISSN: 18822398     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj2.52.163     Document Type: Article

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