Preparation of Pt-PtOx thin films as electrode for memory capacitors

Thin Solid Films

Volumn 400, Issue 1-2, 2001, Pages 160-164

  Kuribayashi, Kiyosi ^a   Kitamura, Seibu ^a  

^a TEIKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Electrode films; Magnetron sputtering; Platinum; Platinum oxide; Thin films

Indexed keywords

CAPACITORS; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRODES; FILM PREPARATION; MAGNETRON SPUTTERING; PLATINUM COMPOUNDS; SILICON; SUBSTRATES; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRODE FILMS;

THIN FILMS;

EID: 0035803162     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01503-6     Document Type: Conference Paper

References (13)