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Volumn 21, Issue 1-4 SPEC. ISS., 2008, Pages 12-16
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The tunability and dielectric properties of the compositionally graded Ba(Zr x Ti1-x )O3 thin films
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Author keywords
Dielectric properties; Gradient; Sol gel; Tunability
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Indexed keywords
COMPOSITION DEPTH PROFILES;
COMPOSITIONAL GRADIENTS;
DIELECTRIC CONSTANTS;
FERROELECTRIC TRANSITION;
GRADIENT;
ION ETCHING;
PRECISE CONTROL;
SI SUBSTRATES;
SOL-GEL DEPOSITION;
TEMPERATURE DEPENDENCE;
TEMPERATURE RANGE;
TUNABILITY;
BARIUM;
CERAMIC CAPACITORS;
DIELECTRIC WAVEGUIDES;
GELATION;
GELS;
PERMITTIVITY;
SOL-GEL PROCESS;
SOL-GELS;
SOLS;
TEMPERATURE DISTRIBUTION;
THIN FILMS;
ZIRCONIUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 67651097946
PISSN: 13853449
EISSN: 15738663
Source Type: Journal
DOI: 10.1007/s10832-007-9074-x Document Type: Article |
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Times cited : (8)
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References (11)
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