Periodic structures patterned on metal and III-V compound surfaces using two-beam interference method

Journal of Electrical Engineering

Volumn 60, Issue 3, 2009, Pages 166-169

  Pudiš, Dušan ^a   Škriniarová, Jaroslava ^b   Martinček, Ivan ^a   Kováč Jr , Jaroslav ^b   Tarjányi, Norbert ^a   Haščík, Štefan ^c  

^a UNIVERSITY OF ILINA   (Slovakia)

^b SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^c INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

Author keywords

Holographic lithography; Interference; Periodic structure

Indexed keywords

EID: 67650601045     PISSN: 13353632     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. HSIEH, M. L.-LO, K. C.-LAN, Y. S.-YANG, S. Y.-LIN, C. H.-LIU, H. M.-KUO, H. C.: One-Shot Exposure for Pat- terning Two-Dimensional Photonic Crystals to Enhance Light Extraction of InGaN-Based Green LEDs, Photonics Technology Letters 20 (2008), 141-143.
2. ALTUG, H.-VUCKOVIC, J.: Photonic Crystal Nanocavity Array Laser, Optics Express 13 (2005), 8819-8828.
3. WU, X.-YAMILOV, A.-LIU, X.-LI, S.-DRAVID, V. P.- CHÁNY, R. P. H.-CAO, H.: Ultraviolet Photonic Crystal Laser, Appl. Phys. Lett. 85 (2004), 3657-3659.
4. MEKIS, A.-CHEN, J. C.-KURLAND, I.-FAN, S. H.-VIL LENEUVE, P. R.-JOANNOPOULOS, J. D.: High Transmission Through Sharp Bends in Photonic Crystal Waveguides, Phys. Rev. Lett. 77 (1996), 3787-3790.
5. DAVID, A.-MEIER, C.-SHARMA, R.-DIANA, F. S.-Den-BAARS, S. P.-HU, E.-NAKAMURA, S.-WEISBUCH, C.- BENISTY, H.: Photonic Bands in Two Dimensionally Pat- terned Multimode GaN Waveguides for Light Extraction, Applied Phys. Lett. 87 (2005), 101-107.
6. CAMPBELL, M.-SHARP, D. N.-HARRISON, M. T.-DEN-NING, R. G.-TURBERFIELD, A. J.: Fabrication of Photonic Crystals for the Visible Spectrum by Holographic Lithography,Nature 404 (2000), 53-56.
7. LIN, Y.-HERMAN, P. R.-ABOLGHASEMI, E. L.: Proposed Single-Exposure Holographic Fabrication of Microsphere-Type Photonic Crystals Through Phase-Mask Techniques, J. Appl.Phys. 97 (2005), 096102.
8. LAI, N. D.-LIANG, W. P.-LIN, J. H.-HSU, C. C.-LIN, C.H.: Fabrication of Two- and Three-Dimensional Periodic Structures by Multi-Exposure of Two-Beam Interference Technique,Optics Express 13 (2005), 9605-9611.
9. QUINONEZ, F.-MENEZES, J. W.-CESCATO, L.-ROD-RIGUEZ-ESQUERRE, V. F.-HERNANDEZ-FIGUEROA, H.-MANSANO, R. D.: Band Gap of Hexagonal 2D Photonic Crystals with Elliptical Holes Recorded by Interference Lithography, Optics Express 14 (2006), 4873-4879.
10. Š KRINIAROVÁ, J.-PUDIŠ, D.-MARTINČEK, I.-KOVÁ Č,J.-TARJÁNYI, N.-VESELÝ, M.-TUREK, I.: Periodic Structures Prepared by Two-Beam Interference Method, Microelectronics Journal 38 (2007), 746-749.
11. ® 5200. New Jersey: Hoechst, Sommerville, 1988.