One-Shot Exposure for Patterning Two-Dimensional Photonic Crystals to Enhance Light Extraction of InGaN-Based Green LEDs

IEEE Photonics Technology Letters

Volumn 20, Issue 2, 2008, Pages 141-143

  Liu, H M ^a   Kuzmin, Konstantin ^a  

^a NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

Author keywords

Holography; light emitting diode (LED); photonic crystal

Indexed keywords

EID: 85008019101     PISSN: 10411135     EISSN: 19410174     Source Type: Journal    
DOI: 10.1109/LPT.2007.912510     Document Type: Article

References (13)

1. M. Boroditsky, R. Vrijen, T. F. Krauss, R. Coccioli, R. Bhat, and E. Yablonovitch, “Spontaneous emission extraction and purcell enhance-ment from thin-film 2-D photonic crystals,” J. Lightw. Technol., vol. 17, no. 11, pp. 2096–2112, Nov. 1999.
2. A. A. Erchak, D. J. Ripin, S. Fan, P. Rakich, J. Joannopoulos, E. P. Ippen, G. S. Petrich, and L. A. Kolodziejski, “Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semi-conductor light-emitting diode,” Appl. Phys. Lett., vol. 78, no. 5, pp. 563–565, Jan. 29, 2001.
3. C. H. Lin, C. F. Lai, T. S. Ko, H. W. Huang, H. C. Kuo, Y. Y. Hung, K. M. Leung, C. C. Yu, R. J. Tsai, C. K. Lee, T. C. Lu, and S. C. Wang, “Enhancement of InGaN-GaN indium-tin-oxide flip-chip light-emitting diodes with Ti02-Si02 multilayer stack omnidirectional re-flector,” IEEE Photon. Technol. Lett., vol. 18, no. 19, pp. 2050–2052, Oct. 1, 2006.
4. H. Y. Ryu, J. K. Hwang, Y. J. Lee, and Y. H. Lee, “Enhancement of light extraction from two-dimensional photonic crystal slab structures,” IEEE J. Sel. Topics Quantum Electron., vol. 8, no. 2, pp. 231–237, Mar. 2002.
5. H. Ichikawa and T. Baba, “Efficiency enhancement in a light-emitting diode with a two-dimensional surface grating photonic crystal,” Appl. Phys. Lett., vol. 84, no. 4, pp. 457–459, 2004.
6. J. Shakya, K. H. Kim, J. Y. Lin, and H. X. Jiang, “Enhanced light ex-traction in Ill-nitride ultraviolet photonic crystal light-emitting diodes,” Appl. Phys. Lett., vol. 85, pp. 142–144, 2004.
7. A. David, C. Meier, R. Sharma, F. S. Diana, S. P. DenBaars, E. Hu, S. Nakamura, C. Weisbush, and H. Benisty, “Photonic bands in two-di-mensionally patterned multimode gan waveguides for light extraction,” Appl. Phys. Lett., vol. 87, no. 10, p. 101107, 2005.
8. T. Kim, P. O. Leisher, A. J. Danner, R. Wirth, K. Streubel, and K. D. Choquette, “Photonic crystal structure effect on the enhancement in the external quantum efficiency of a red LED,” IEEE Photon. Technol. Lett., vol. 18, no. 17, pp. 1876–1878, Sep. 1, 2006.
9. D. H. Kim, C. O. Cho, Y. G. Roh, H. Jeon, Y. S. Park, J. Cho, J. S. Im, C. Sone, Y. Park, W. J. Choi, and Q. H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett., vol. 87, p. 203508, 2005.
10. Z. S. Zhang, B. Zhang, J. Xu, K. Xu, Z. J. Yang, Z. X. Qin, T. J. Yu, and D. P. Yu, “Effects of symmetry of GaN-based two-dimensional photonic crystal with quasi-crystal lattices on enhancement of surface light extraction,” Appl. Phys. Lett., vol. 88, p. 171103, 2006.
11. H. H. Solak, C. David, J. Gobrecht, L. Wang, and F. Cerrina, “Multiple-beam interference lithography with electron beam written gratings,” J. Vac. Sci. Technol. B: Microelectr. Nanometer Struc., vol. 20, p. 2844, 2002.
12. H. M. Su, Y. C. Zhong, X. Wang, X. G. Zheng, J. F. Xu, and H. Z. Wang, “Effects of polarization on laser holography for microstructure fabrication,” Phys. Rev. E, vol. 67, p. 056619, 2003.
13. L. Z. Cai, X. L. Yang, and Y. R. Wang, “All fourteen bravais lattices can be formed by interference of four noncoplanar beams,” Opt. Lett., vol. 27, pp. 900–903, 2002.