Fabrication of a high temperature-resistance optical fibre micro pressure sensor

2009 6th International Multi-Conference on Systems, Signals and Devices, SSD 2009

Volumn , Issue , 2009, Pages

  Bremer, K ^a   Lewis, E ^a   Moss, B ^a   Leen, G ^b   Lochmann, S ^c   Mueller, I ^c  

^a UNIVERSITY OF LIMERICK   (Ireland)

^b UNIVERSITY OF LIMERICK   (Ireland)

^c Hochschule Wismar   (Germany)

Author keywords

Fabry perot interferometer; Optical fibre sensors; Pressure measurement

Indexed keywords

FABRY-PEROT; FUSION SPLICERS; GLASS CAPILLARIES; GLASS DIAPHRAGMS; HIGH TEMPERATURE; HIGH TEMPERATURE RESISTANCE; MICRO PRESSURE SENSORS; OPTICAL FIBRE; OPTICAL FIBRE SENSORS; SILICA GLASS; SINGLE MODE; SMALL SIZE; THERMAL MISMATCH;

DIAPHRAGMS; FABRY-PEROT INTERFEROMETERS; FEEDBACK; FIBER OPTIC SENSORS; FIBER OPTICS; FIBERS; FREQUENCY RESPONSE; FUSED SILICA; GLASS; HIGH TEMPERATURE OPERATIONS; INTERFEROMETRY; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; PRESSURE MEASUREMENT; PRESSURE TRANSDUCERS; SILICA;

PRESSURE SENSORS;

EID: 67650514225     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SSD.2009.4956676     Document Type: Conference Paper

References (11)

1. Taehan Bae et al, "Interferometric fiber-optic sensor embedded in a spark plug for in-cylinder pressure measurement in engines," Applied Optics, Vol. 42, pp. 1003-1007, 2003.
2. Juncheng Xu et al, "A novel temperature-insensitive optical fiber pressure sensor for harsh environments," IEEE Photonics Technology Letters, Vol. 17, pp. 870-872, 2005. (Pubitemid 40555853)
3. W. Parkes et al, "Design and fabrication of dielectric diaphragm pressure sensor for application to shock wave measurement in air," Journal of Micromechanics and Microengineering, Vol. 17, pp. 1334-1342, 2007. (Pubitemid 47192954)
4. G. C. Hill et al, "SU-8 MEMS Fabry-Perot pressure sensor," Sensors and Actuators A, Vol. 138, pp. 52-62, 2005.
5. Yizheng Zhu et al, "Miniature Fiber-Optic Pressure Sensor," IEEE Photonics Technology Letters, Vol. 17, pp. 447-449, 2005. (Pubitemid 40211176)
6. D. Donlagic et al, "All-fibre high-sensitivity pressure sensor with SiO2 diaphragm," Optics Letters, Vol. 30, pp. 2071-2073, 2005. (Pubitemid 41251398)
7. Xingwei Wang et al, "All-fused-silica miniature optical fiber tip pressure sensor," Optics Letters, Vol. 31, pp. 885-887, 2006. (Pubitemid 43837494)
8. Juncheng Xu et al, "Miniature all-silica fiber optic pressure and acoustic sensors," Optics Letters, Vol. 30, pp. 3269-3271, 2005. (Pubitemid 43099173)
9. Mario Di Giovanni, "Flat and corrugated diaphragm design handbook," Marcel Dekker AG, 1982.
10. Werner Soedel, "Vibration of Shells and Plates," Marcel Dekker AG, 2004.
11. C. Boulet et al, "Fiber-optic-based absolute displacement sensors at 1500nm by means of a variant of channelled spectrum signal recovery," Optics Letters, Vol. 29, pp. 1602-1604, 2004.