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Volumn 311, Issue 15, 2009, Pages 3954-3962

Birefringence simulation of annealed ingot of magnesium fluoride single crystal

Author keywords

A1. Computer simulation; A1. Stresses; A2. Growth from melt; A2. Lithography; A2. Magnesium fluoride

Indexed keywords

A1. COMPUTER SIMULATION; A1. STRESSES; A2. GROWTH FROM MELT; A2. LITHOGRAPHY; A2. MAGNESIUM FLUORIDE;

EID: 67650400370     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2009.06.026     Document Type: Article
Times cited : (10)

References (13)
  • 4
    • 67650419872 scopus 로고    scopus 로고
    • MSC Software, Marc Theory and User Information, Version
    • MSC Software, MSC Marc Vol. A, Theory and User Information, Version 2003, 2003.
    • (2003) MSC , vol.A
  • 7
    • 67650463615 scopus 로고    scopus 로고
    • http://www.ispoptics.com/New%20ISP%20Pages/Page11.pdf
  • 9
    • 67650430546 scopus 로고    scopus 로고
    • http://www.corning.com/docs/specialtymaterials/pisheets/H0607_MgF2_Product_Sheet.pdf
  • 11
    • 67650436665 scopus 로고    scopus 로고
    • http://www.ispoptics.com/New%20ISP%20Pages/Page18.pdf
  • 12
    • 0040611181 scopus 로고    scopus 로고
    • Measurement of low-level strain birefringence in optical elements using a photoelastic modulator
    • Oakeberg. Measurement of low-level strain birefringence in optical elements using a photoelastic modulator. SPIE Proc. 2873 (1996) 17
    • (1996) SPIE Proc. , vol.2873 , pp. 17
    • Oakeberg1
  • 13
    • 65849425132 scopus 로고    scopus 로고
    • Birefringence calculation of annealed ingot of calcium fluoride single crystal (consideration of creep behavior of ingot during annealing process)
    • Optical Microlithography , Paper no. 7274-151
    • N. Miyazaki, H. Ogino, Y. Kitamura, T. Mabuchi, T. Nawata, Birefringence calculation of annealed ingot of calcium fluoride single crystal (consideration of creep behavior of ingot during annealing process), In: Proceedings of Advanced Lithography, Vol. 7274 Optical Microlithography (2009), Paper no. 7274-151.
    • (2009) Proceedings of Advanced Lithography , vol.7274
    • Miyazaki, N.1    Ogino, H.2    Kitamura, Y.3    Mabuchi, T.4    Nawata, T.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.