Effect of resonance-mode order on mass-sensing resolution of microcantilever sensors

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 577-580

  Xia, Xiaoyuan ^a   Zhou, Ping ^a   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-DRAG; ANALYTIC CONCLUSION; BIOTIN-AVIDIN; EXPERIMENTAL METHODS; FLEXURAL MODES; HIGHER-ORDER MODES; LOWER ORDER MODE; MICRO CANTILEVER SENSORS; MICROMACHINING TECHNIQUES; MODE ORDER; OPTIMAL DESIGN; Q-FACTOR; RESONANT MICROCANTILEVERS; SENSING PERFORMANCE; SENSING RESOLUTION; SILICON CANTILEVER; SOFTWARE SIMULATION; SYSTEMATIC STUDY; THEORETIC ANALYSIS; TORSIONAL MODES;

CHEMICAL SENSORS; COMPUTER SOFTWARE; NANOCANTILEVERS; RESONANCE;

COMPOSITE MICROMECHANICS;

EID: 67649990289     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716505     Document Type: Conference Paper

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