MicroPen direct-write deposition of polyimide

Microelectronic Engineering

Volumn 86, Issue 10, 2009, Pages 1989-1993

  Cao, Yu ^a   Zhou, Liangwen ^a   Wang, Xiaoye ^a   Li, Xiangyou ^a   Zeng, Xiaoyan ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Direct write; MEMS; MicroPen; Paste; Polyimide

Indexed keywords

AIR-BRIDGE; DIRECT-DRIVEN; DIRECT-WRITE; DIRECT-WRITE DEPOSITION; DIRECT-WRITING; DIVERSE MATERIALS; GOLD PASTE; MASK LESS; MEMSDEVICES; MICROPEN; PASTE; POTENTIAL APPLICATIONS; PROTOTYPING; SACRIFICIAL LAYER; SACRIFICIAL MATERIAL; STRUCTURAL LAYERS; SUBSTRATE DISTANCE;

ECONOMIC ANALYSIS; FABRICATION; GOLD; GOLD DEPOSITS; MEMS; MICROELECTROMECHANICAL DEVICES;

POLYIMIDES;

EID: 67649958728     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.069     Document Type: Article

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