Laser-induced resonant excitation of ethylene molecules in C 2H4/C2H2/O2 reactions to enhance diamond deposition

Journal of Applied Physics

Volumn 105, Issue 1, 2009, Pages

  Ling, H ^a   Sun, J ^a   Han, Y X ^a   Gebre, T ^a   Xie, Z Q ^a   Zhao, M ^a   Lu, Y F ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE SPECIES; DEPOSITED FILMS; DIAMOND DEPOSITION; EMISSION SPECTRUMS; ETHYLENE MOLECULES; GRAIN SIZE; LASER INDUCED; LASER RESONANT; NON-THERMAL PROCESS; OPTICAL EMISSIONS; RESONANT EXCITATION; TEMPERATURE CALCULATION; VIBRATIONAL MODES;

ACETYLENE; ATOMIC SPECTROSCOPY; CARBON DIOXIDE; CARBON DIOXIDE LASERS; DIAMOND DEPOSITS; DIAMONDS; EMISSION SPECTROSCOPY; ETHYLENE; LASERS; LIGHT EMISSION; LIGHTING; MOLECULAR SPECTROSCOPY; MOLECULES; OPTICAL EMISSION SPECTROSCOPY; OXYGEN;

LASER EXCITATION;

EID: 67649779153     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2986217     Document Type: Article

References (29)

1. J. Wei, J. M. Chang, and Y. Tzen, Thin Solid Films 0040-6090 10.1016/0040-6090(92)90504-5 212, 91 (1992).
2. D. Michau, B. Tanguy, and G. Demazeau, Mater. Lett. 0167-577X 10.1016/0167-577X(93)90084-B 17, 192 (1993).
3. Y. Hirose and N. Kondo, Program and Book of Abstracts, Japan Applied Physics Spring Meeting, Tokyo, 1988 (unpublished).
4. H. S. Shin and D. G. Goodwin, Appl. Phys. Lett. 0003-6951 10.1063/1.113700 66, 2909 (1995).
5. T. L. Huu, H. Zaidi, and D. Paulmier, Thin Solid Films 0040-6090 308-309, 147 (1997).
6. Y. Ando, S. Tobe, T. Saito, J. Sakurai, H. Tahara, and T. Yoshikawa, Thin Solid Films 0040-6090 10.1016/j.tsf.2003.12.042 457, 217 (2004).
7. B. Donnet, H. Oulanti, T. L. Huu, and M. Schmitt, Carbon 0008-6223 10.1016/j.carbon.2005.06.041 44, 374 (2006).
8. M. Novotny, M. Jelinek, J. Bulir, J. Lancok, V. Vorlicek, and J. Bonarski, Appl. Phys. A: Mater. Sci. Process. 0947-8396 10.1007/s00339-004-2733- 8 79, 1267 (2004).
9. O. G. Epanchintsev, A. S. Zubchenko, A. E. Korneyev, and V. A. Simonov, J. Phys. Chem. Solids 0022-3697 10.1016/S0022-3697(97)00066-8 58, 1785 (1997).
10. A. Gicquel, E. Anger, M. F. Ravet, D. Fabre, G. Scatena, and Z. Z. Wang, Diamond Relat. Mater. 0925-9635 10.1016/0925-9635(93)90094-I 2, 417 (1993).
11. D. Takeuchi, H. Watanabe, S. Yamanaka, H. Okushi, and K. Kajimura, Phys. Status Solidi A 0031-8965 10.1002/(SICI)1521-396X(199907)174:1<101::AID- PSSA101>3.0.CO;2-O 174, 101 (1999).
12. J. Asmussen and D. K. Reinhard, Diamond Films Handbook (Dekker, New York, 2002), p. 141.
13. J. Gaze, T. Obata, N. Oyanagi, H. Izawa, Y. Ikuhara, M. Kusunoki, and W. Zhou, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/S0168-583X(96)00386- 2 121, 427 (1997).
14. Z. Tóth,. Mechler, and P. Heszler, Appl. Surf. Sci. 0169-4332 10.1016/S0169-4332(00)00563-8 168, 5 (2000).
15. J. W. Rich and R. C. Bergman, Chem. Phys. 0301-0104 10.1016/0301-0104(79) 80062-2 44, 53 (1979).
16. R. C. Bergman, G. F. Homicz, J. W. Rich, and G. L. Wolk, Chem. Phys. 0301-0104 10.1063/1.444866 78, 1281 (1983).
17. R. L. Deleon and J. W. Rich, Chem. Phys. 0301-0104 10.1016/0301-0104(86) 85008-X 107, 283 (1986).
18. K. A. Snail, R. G. Vardiman, J. P. Estrera, J. W. Glesener, C. Merzbacher, C. J. Craigie, C. M. Marks, R. Glosser, and J. A. Freitas, J. Appl. Phys. 0021-8979 10.1063/1.354982 74, 7561 (1993).
19. D. B. Oakes, J. E. Butler, K. A. Snail, W. A. Carrington, and L. M. Hanssen, J. Appl. Phys. 0021-8979 10.1063/1.348651 69, 2602 (1991).
20. J. S. Kim and M. A. Cappelli, Appl. Phys. Lett. 0003-6951 10.1063/1.112563 65, 2786 (1994).
21. J. S. Kim and M. A. Cappelli, J. Appl. Phys. 0021-8979 10.1063/1.368685 84, 4595 (1998).
22. P. R. Buerki and S. Leutwyler, J. Appl. Phys. 0021-8979 10.1063/1.348468 69, 3739 (1991).
23. R. J. H. Klein-Douwel, J. J. L. Spaanjaars, and J. J. Meulen, J. Appl. Phys. 0021-8979 10.1063/1.360186 78, 2086 (1995).
24. H. Ling, Y. X. Han, M. Zhao, J. Sun, and Y. F. Lu, Proceedings of the Carbon Conference 2007, Seattle, 2007 (unpublished).
25. F. G. Celii, Annu. Rev. Phys. Chem. 42, 643 (1991). 0066-426X
26. V. Mortet, Z. Hubicka, V. Vorlicek, K. Jurek, J. Rosa, and M. Vanecek, Phys. Status Solidi A 0031-8965 10.1002/pssa.200405179 201, 2425 (2004).
27. Y. Matsui, A. Yuuki, M. Sahara, and Y. Hirose, Jpn. J. Appl. Phys., Part 1 0021-4922 10.1143/JJAP.28.1718 28, 1718 (1989).
28. J. Asmussen and D. K. Reinhard, Diamond Films Handbook (Dekker, New York, 2002), p. 645.
29. H. S. Myung, Y. S. Park, M. J. Jung, B. Hong, and J. G. Han, Mater. Lett. 0167-577X 10.1016/j.matlet.2003.10.021 58, 1513 (2004).