Modelling of voids in complex radio frequency plasmas

Contributions to Plasma Physics

Volumn 49, Issue 4-5, 2009, Pages 199-214

  Goedheer, W J ^a   Land, V ^b   Venema, J ^a  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b BAYLOR UNIVERSITY   (United States)

Author keywords

Complex plasma; Dusty plasma; Hydrodynamic modelling; Kinetic modelling; RF discharges

Indexed keywords

HYDRODYNAMICS; KINETIC THEORY; KINETICS; PLASMA SIMULATION; PLASMA THEORY; SPACE STATIONS;

CAPACITIVELY COUPLED; COMPLEX PLASMA; DUSTY PLASMAS; HYDRODYNAMIC MODELING; KINETIC APPROACH; KINETIC MODELS; LOW PRESSURES; RADIO FREQUENCY DISCHARGES; RADIO FREQUENCY PLASMA; RF DISCHARGE;

ELECTRIC DISCHARGES;

EID: 67649536016     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.200910023     Document Type: Article

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