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Volumn 9, Issue 3, 2009, Pages 1696-1700
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Nanopatterning on silicon wafers using AFM-based lithography-for solar cells
a a,b,c d c e |
Author keywords
[No Author keywords available]
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Indexed keywords
AFM;
AFM IMAGE;
APPLIED BIAS;
DWELL TIME;
ELECTRICAL BIAS;
IMAGING FEATURES;
INTERACTION TIME;
LINEAR PATTERNS;
NANO PATTERN;
NANOPATTERNING;
OXIDE PATTERNS;
WORKING ENVIRONMENT;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
ATOMIC FORCE MICROSCOPY;
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EID: 67649200861
PISSN: 15334880
EISSN: None
Source Type: Journal
DOI: 10.1166/jnn.2009.SI08 Document Type: Conference Paper |
Times cited : (4)
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References (14)
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