Microactuation of suspended MEMS beams

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn , Issue , 2005, Pages 2755-2758

  Gattiker, Giorgio ^a   Kaler, Karan V I S ^a   Mintchev, Martin P ^a  

^a UNIVERSITY OF CALGARY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION PRINCIPLES; MICRO BEAMS; MICROACTUATION; MICROELECTROMECHANICAL SYSTEMS; MICROFABRICATION PROCESS; SILICON-ON-INSULATOR;

COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES;

SILICON ON INSULATOR TECHNOLOGY;

EID: 67649105797     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISCAS.2005.1465197     Document Type: Conference Paper

References (7)

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3. J. W. Judy, Microelectromechanical systems (MEMS): Fabrication, design and applications, Smart Materials and Structures, vol. 10, pp. 1115-1134, 2001.
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6. CMC and Micralyne, Introduction to MicraGEM: A Silicon-on-Insulator Based Micromachining Process, Version 2.0, 2003.
7. G. T. A. Kovacs, Micromachined transducers sourcebook. Boston: WCB/McGraw-Hill, 1998.