Structural and magnetic properties of Ni3N synthesized by multidipolar microwave plasma-assisted reactive sputtering

Journal of Alloys and Compounds

Volumn 480, Issue 2, 2009, Pages 225-229

  Vempaire, D ^a,b   Miraglia, S ^a   Pelletier, J ^b   Fruchart, D ^a   Hlil, E K ^a   Ortega, L ^a   Sulpice, A ^a   Fettar, F ^a  

^a CNRS   (France)

^b UNIVERSITÉ JOSEPH FOURIER GRENOBLE 1   (France)

Author keywords

Magnetic layers; Nickel nitrides; Plasma assisted deposit

Indexed keywords

FERROMAGNETIC BEHAVIORS; MAGNETIC LAYERS; MICROWAVE PLASMA; MULTI-DIPOLAR PLASMAS; NITRIDE LAYERS; PHYSICAL MEASUREMENT; STRUCTURAL AND MAGNETIC PROPERTIES; TRANSITION METAL NITRIDES;

DEPOSITS; LITHIUM COMPOUNDS; MAGNETIC DEVICES; MAGNETIC PROPERTIES; MICROWAVES; NICKEL ALLOYS; NITRIDES; PLASMAS; REACTIVE SPUTTERING; STOICHIOMETRY;

NICKEL;

EID: 67349233050     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2009.02.066     Document Type: Article

References (21)

1. Zhou J.N., Rar A., Otte D., and Barnard J.A. J. Appl. Phys. 88 (2000) 1880
2. Cantwell P.R., Gibson U.J., Allwood D.A., and Macleod H.A.M. J. Appl. Phys. 100 (2006) 093910
3. Pérez-Rigueiro J., Jiménez C., Pérez-Casero R., and Martínez-Duart J.M. J. Appl. Phys. 81 (1997) 781
4. Lingwal V., and Panwar N.S. J. Appl. Phys. 97 (2005) 104902
5. Dubey R., and Gupta A. J. Appl. Phys. 98 (2005) 083903
6. Juza R., and Sachze W. Z. Anorg. Allg. Chem. 251 (1943) 201
7. Dorman G.J.W., and Sikkens M. Thin Solid Films 105 (1983) 251
8. Neklyudov I.M., and Morozov A.N. Physica B 350 (2004) 325
9. Vempaire D., Miraglia S., Sulpice A., et al. J. Magn. Magn. Mater. 272 (2004) E843-E844
10. Takamori T., Shih K.K., Dove D.B., Nywening R.W., and Re M.E. J. App. Phys. 68 (1990) 2192
11. Maya L., Thundat T., Thompson J.R., and Stevenson R.J. App. Phys. Lett. 67 (1995) 3034
12. Gajbhiye N.S., Ningthoujam R.S., and Weissmuller J. Phys. Stat. Sol. (a) 189 (2002) 691
13. Cullity B.D. Introduction to Magnetic Materials (1972), Addison-Wesley, Reading, MA
14. Béchu S., Maulat O., Lacoste A., Arnal Y., Vempaire D., and Pelletier J. Surf. Coat. Technol. 186 (2004) 170
15. Jack K.H. Acta Cryst. 5 (1952) 404
16. Leineweber A., Jacobs H., and Hull S. Inorg. Chem. 40 (2001) 5818
17. Vempaire D., Pelletier J., Lacoste A., Béchu S., Sirou J., Miraglia S., and Fruchart D. Plasma Phys. Control. Fusion 47 (2005) A153
18. Blaha P., Schwartz K., Sorantin P., and Trikey S.B. Comput. Phys. Commun. 59 (1990) 39-49
19. Kohn W., and Sham L.J. Phys. Rev. 140 (1965) A1133
20. Shimizu H., Shirai M., and Suzuki N. J. Phys. Soc. Jpn. 66 (1997) 3147
21. Hong-Bo W., and De-Sheng Chi X. Phys. Lett. 21 (2004) 1612