A thin-film cochlear electrode array with integrated position sensing

Journal of Microelectromechanical Systems

Volumn 18, Issue 2, 2009, Pages 385-395

  Wang, Jianbai ^a   Wise, Kensall D ^b  

^a TEXAS INSTRUMENTS   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Cochlear prosthesis; Neural probes; Piezoresistance; Position measurement; Strain gauge

Indexed keywords

BULK MICROMACHINING TECHNOLOGIES; CLOSED-LOOP CONTROLS; COCHLEAR ELECTRODES; COCHLEAR PROSTHESIS; CONTROL DEVICES; ELECTRODE STRUCTURES; GAUGE FACTORS; INTEGRATED POSITION SENSING; INTEGRATED POSITION SENSORS; NEURAL PROBES; OUTPUT SIGNALS; PARYLENE; PIEZO RESISTIVE SENSORS; PIEZORESISTANCE; SHAPE RECOGNITION; STRAIN GAUGE; THIN-FILM; THIN-FILM ELECTRODES; TIME-MULTIPLEXED; TISSUE DAMAGES; WALL CONTACTS; WHEATSTONE BRIDGES;

BRIDGE CIRCUITS; CLOSED LOOP CONTROL SYSTEMS; POLYSILICON; POSITION MEASUREMENT; PROBES; PROSTHETICS; SENSORS; STRAIN GAGES; THIN FILM DEVICES;

ELECTROCHEMICAL ELECTRODES;

EID: 67349216123     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2011722     Document Type: Article

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