Compositional dependence of damage buildup in Ar-ion bombarded AlGaN

Vacuum

Volumn 83, Issue SUPPL.1, 2009, Pages

  Pagowska, K ^a   Ratajczak, R ^a   Stonert, A ^a   Nowicki, L ^a   Turos, A ^a,b  

^a SOLTAN INSTITUTE FOR NUCLEAR STUDIES   (Poland)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

AlGaN; Defects; Ion implantation; RBS channeling

Indexed keywords

ALGAN; ALLOY COMPOSITIONS; COMPOSITIONAL DEPENDENCES; DAMAGE ACCUMULATION MODELS; DAMAGE DISTRIBUTIONS; FLUENCES; LATTICE ATOMS; MONTE CARLO SIMULATIONS; MOVPE; MULTI STEPS; RBS/CHANNELING; SAPPHIRE SUBSTRATES; STRUCTURAL DEFECTS;

CORUNDUM; DEFECTS; HELIUM; ION BOMBARDMENT; ION IMPLANTATION; MONTE CARLO METHODS;

EPITAXIAL LAYERS;

EID: 67349196054     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.01.048     Document Type: Article

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