Proton related defects in α-BaTiO3:H films based MIM capacitors

Solid State Ionics

Volumn 180, Issue 11-13, 2009, Pages 853-856

  El Kamel, F ^a   Gonon, P ^b  

^a LABORATOIRE D ELECTROTECHNIQUE DE GRENOBLE   (France)

^b CEA GRENOBLE   (France)

Author keywords

BaTiO3:H films; MIM capacitors; Proton related defects

Indexed keywords

CONDUCTION PROCESS; DIELECTRIC LAYER; ELECTRICAL PROPERTY; HIGH DIELECTRIC CONSTANTS; IONIC SPECIES; LOW-TEMPERATURE DEPOSITION; METAL INSULATOR METALS; MIM CAPACITORS; SUPER CAPACITOR; TRAP LEVELS;

BARIUM; BARIUM TITANATE; CAPACITANCE; CAPACITORS; DEFECTS; HYDROGEN; METAL INSULATOR BOUNDARIES; PROTONS;

MIM DEVICES;

EID: 67349180728     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssi.2009.02.009     Document Type: Article

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