Dielectric properties of amorphous BaTiO3 films deposited by RF magnetron sputtering

Journal of the European Ceramic Society

Volumn 27, Issue 13-15, 2007, Pages 3807-3809

  Kamel, F El ^a,b   Gonon, P ^a   Jomni, F ^b   Yangui, B ^b  

^a CNRS   (France)

^b Organization and Properties LabMOP   (Tunisia)

Author keywords

BaTiO3 films; Dielectric properties

Indexed keywords

BARIUM COMPOUNDS; CHARGE TRANSFER; DIELECTRIC PROPERTIES; DIELECTRIC SPECTROSCOPY; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; RELAXATION PROCESSES; TEMPERATURE;

ELECTRODE-FILM INTERFACES; FUNCTION OF FREQUENCY;

DIELECTRIC FILMS;

BARIUM COMPOUNDS; CHARGE TRANSFER; DIELECTRIC FILMS; DIELECTRIC PROPERTIES; DIELECTRIC SPECTROSCOPY; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; RELAXATION PROCESSES; TEMPERATURE;

EID: 34347340579     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2007.02.038     Document Type: Article

References (12)

1. Waser R., Baiatu T., and Hardtl K.H. DC electrical degradation of perovskite-type titanates. I. Ceram. J. Am. Ceram. Soc. 73 (1990) 1645-1953
2. Waser R. Processing: degradation and reliability. In: Setter N., and Colla E.L. (Eds). Ferroelectric ceramics (1993), Birkhauser Verlag, Basel, Switzerland 273-298
3. 3 thin films. J. Appl. Phys. 99 (2006) 0941071-0941075
4. Briggs D., and Seah M. Practical surface analysis by Auger and X-ray photoelectron spectroscopy (1996), John Wiley and Sons, Chichester, UK
5. Wegmann M., Watson L., and Hendry A. XPS analysis of submicrometer barium titanate powder. J. Am. Ceram. Soc. 87 (2004) 371-377
6. Waser R. Bulk conductivity and defect chemistry of acceptor-doped strontium titanate in the quenched state. J. Am. Ceram. Soc. 74 (1991) 1934-1940
7. Vollman M., and Waser R. Grain boundary defect chemistry of acceptor-doped titanates: space charge layer width. J. Am. Ceram. Soc. 77 (1994) 235-243
8. Jonscher A.K. Dielectric relaxation in solids (1983), Chelsea Dielectric, London
9. Waser R. Electrochemical boundary conditions for resistance degradation of doped alkaline-earth titanates. J. Am. Ceram. Soc. 72 (1989) 2234-2240
10. 3 thin films. J. Appl. Phys. 87 (2000) 849-854
11. 3 films. Appl. Phys. Lett. 73 (1998) 175-177
12. 3 thin-film capacitors. Appl. Phys. Lett. 75 (1999) 1784-1786