Qualitative and quantitative characterization of outgassing from SU-8

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 761-764

  Melai, Joost ^a   Salm, Cora ^a   Wolters, Rob ^a,b   Schmitz, Jurriaan ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b NXP Research   (Netherlands)

Author keywords

Gas chromatography; Mass spectrometry; Microsystems; Outgassing; Packaging; SU 8; Vacuum

Indexed keywords

BAKE TEMPERATURES; IN-SITU; OUTGASSING; OUTGASSING CHARACTERISTICS; OUTGASSING RATES; QUALITATIVE ESTIMATES; QUANTITATIVE CHARACTERIZATIONS; STRUCTURAL MATERIALS; SU-8;

BUILDING MATERIALS; CHROMATOGRAPHIC ANALYSIS; DEGASSING; GASES; MASS SPECTROMETERS; MASS SPECTROMETRY; MICROSYSTEMS; SPECTRUM ANALYSIS; VACUUM;

GAS CHROMATOGRAPHY;

EID: 67349175357     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.008     Document Type: Article

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