Increasing the maximum operating frequency of SAW filters fabricated using an I-line source

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1300-1302

  Lai, Fu Der ^a   Hua, Jui Ming ^a,b  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b METAL INDUSTRIES RESEARCH AND DEVELOPMENT CENTRE   (Taiwan)

Author keywords

Narrow gap structure; Near field phase shift photolithography; Unbalanced structure technique

Indexed keywords

GAP WIDTHS; HIGH OPERATING FREQUENCIES; I-LINE LITHOGRAPHIES; LINE SOURCES; LINE WIDTHS; MAXIMUM OPERATING FREQUENCIES; NANO GAPS; NARROW GAP STRUCTURE; NEAR FIELD PHASE SHIFT PHOTOLITHOGRAPHY; OPERATING FREQUENCIES; OPERATION FREQUENCIES; SAW DEVICES; SAW FILTERS; UNBALANCED STRUCTURE TECHNIQUE;

ACOUSTIC WAVES; ACOUSTICS; LIGHT; LIGHT SOURCES; PHASE SHIFT;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 67349135271     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.039     Document Type: Article

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