Characterization of mechanical stress on nanostructures for NEMS applications by ultra-thin membrane and self-suspension techniques

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1303-1306

  Bercu, Bogdan ^a   Xu, Xin ^a   Montès, Laurent ^a   Morfouli, Panagiota ^a  

^a IMEP LAHC   (France)

Author keywords

Carbon nanotubes; Nanomanipulation; NEMS; SOI; Ultra thin silicon membranes

Indexed keywords

AFM; ELECTRONIC TRANSPORTS; IN-PLANE STRESS; MECHANICAL STRESS; NANO-ELECTRO-MECHANICAL SYSTEMS; NANOMANIPULATION; SOI; ULTRA-THIN MEMBRANES; ULTRA-THIN SILICON MEMBRANES;

ELECTRIC WIRE; MICROMANIPULATORS; NANOSTRUCTURES; OXYGEN PERMEABLE MEMBRANES; STRESSES;

CARBON NANOTUBES;

EID: 67349120003     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.005     Document Type: Article

References (8)

1. Ouisse T., Stark M., Rodrigues-Martins F., Bercu B., Huant S., and Chevrier J. Physical Review B: Condensed Matter and Materials Physics 71 20 (2005) 205404-205416
2. B. Bercu, L. Montès, P. Morfouli, 3rd European Advanced Technology Workshop on Micropackaging and Thermal Management, 30th - 31st January, 2008, La Rochelle, France.
3. Gallon C., Reimbold G., Ghibaudo G., Bianchi R.A., Gwoziecki R., Orain S., Robilliart E., Raynaud C., and Dansas H. IEEE Transactions on Electron Devices 51 8 (2004) 1254-1261
4. B. Bercu, L. Montès, P. Morfouli, NSTI Nanotech 2006, May 7-11, 2006 Boston (USA).
5. Blasquez G., Pons P., and Eoukabache A. Sensors and Actuators Physical 17 (1989) 387-404
6. Yamashita Y., Kawazu R., Itoh T., Kawamura K., Ohno S., Kobayashi K., Asano T., and Nagamatsu G. Microelectronic Engineering 3 1-4 (1985) 305-312
7. H.B. Fan, Cell K.Y. Wong, Matthew M.F. Yuen, in: Proceedings of the Electronic Components and Technology Conference, vol. 1, 2005, pp. 145-150.
8. B. Bercu, L. Montès, G. Bacles, J. Zimmermann, P. Morfouli, TNT2006 "Trends in Nanotechnology", 4-8 October 2006, Grenoble, (France).