Topography-sensitive copper deposition in supercritical solutions

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 902-905

  Kondoh, E ^a   Nagano, K ^a   Yamamoto, C ^a   Yamanaka, J ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

Capillary condensation; Copper; Nanorod; Supercritical fluid

Indexed keywords

CAPILLARY CONDENSATION; COPPER DEPOSITIONS; HIGH CONCENTRATIONS; MAXIMUM TEMPERATURES; METALLIC COPPERS; PREFERENTIAL GROWTHS; SINGLE-CRYSTALLINE; SUPERCRITICAL CARBON DIOXIDES; SUPERCRITICAL SOLUTIONS; VISUALIZATION EXPERIMENTS;

CARBON DIOXIDE; CONDENSATION; COPPER; COPPER DEPOSITS; DISSOLUTION; EFFLUENT TREATMENT; ENGINEERING GEOLOGY; NANORODS; SUPERCRITICAL FLUIDS;

SUPERCRITICAL FLUID EXTRACTION;

EID: 67349113413     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.084     Document Type: Article

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