Quantifying the accuracy of ellipsometer systems

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1031-1035

  Johs, Blaine ^a   Herzinger, C M ^a  

^a J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETERS; ELLIPSOMETRIC DATA; SIMPLE METHOD;

SPECTROSCOPIC ELLIPSOMETRY;

EID: 67249117203     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200777755     Document Type: Conference Paper

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