Surface nanopatterns induced by ion-beam sputtering

Journal of Physics Condensed Matter

Volumn 21, Issue 22, 2009, Pages

  Cuerno, Rodolfo ^a   Vázquez, Luis ^b   Gago, Raúl ^b   Castro, Mario ^c  

^a UNIVERSIDAD CARLOS III DE MADRID   (Spain)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^c Universidad Pontificia Comillas   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 66549127071     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/21/22/220301     Document Type: Editorial

References (10)

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3. Facsko S, Dekorsy T, Koerdt C, Trappe C, Kurz H, Vogt A and Hartnagel H L 1999 Formation of ordered nanoscale semiconductor dots by ion sputtering Science 285 1551
4. Li J, Stein D, McMullan C, Branton D, Aziz M J, Golovchenko J A 2001 Ion-beam sculpting at nanometre length scales Nature 412 166
5. Bradley R M and Harper JME 1988 Theory of ripple topography induced by ion bombardment J. Vac. Sci. Technol. A 6 2390
6. Sigmund P 1969 Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets Phys. Rev. 184 383
7. Carter G 2001 The physics and applications of ion beam erosion J. Phys D: Appl. Phys. 34 R1
8. Valbusa U, Boragno C and de Mongeot F B 2002 Nanostructuring surfaces by ion sputtering J. Phys.: Condens. Matter 14 8153
9. Chan W L and Chason E 2007 Making waves: kinetic processes controlling surface evolution during low energy ion sputtering J. Appl. Phys. 101121301
10. Muñoz-García J, Vázquez L, Cuerno R, Sánchez-García J A, Castro M and Gago R 2009 Self-organized surface nanopatterning by ion beam sputtering Towards Functional Nanomaterials ed Z M Wang (New York: Springer)